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Optical fiber cantilever beam microphone for photoacoustic spectrum detection and manufacturing method

A photoacoustic spectroscopy, cantilever beam technology, applied in color/spectral characteristic measurement, instruments, measuring devices, etc., can solve the problems of not strictly linear displacement response, unfavorable accurate detection of photoacoustic signals, etc., to avoid inaccurate measurement, Increased practicality, compact structure

Inactive Publication Date: 2015-08-26
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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Problems solved by technology

However, when the capacitive microphone vibrates, the stretch of the elastic film is radial when the pressure changes, resulting in a non-strict linear displacement response, which is not conducive to the accurate detection of photoacoustic signals.

Method used

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  • Optical fiber cantilever beam microphone for photoacoustic spectrum detection and manufacturing method
  • Optical fiber cantilever beam microphone for photoacoustic spectrum detection and manufacturing method
  • Optical fiber cantilever beam microphone for photoacoustic spectrum detection and manufacturing method

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Embodiment Construction

[0033] Such as image 3 As shown, the manufacturing method of the optical fiber cantilever beam microphone for photoacoustic spectrum detection of the present invention is as follows: first, the polymer annular film 14 is fixed on the laser processing table, and the nanosecond pulse laser is processed according to the set program to obtain the polymerized Object cantilever beam 13. The laser repetition frequency used in processing is generally 40kHz, and the average power is less than 1mW. The shape of the polymer cantilever beam can be controlled by software, and it is generally rectangular, so as to facilitate the connection with the fiber optic ceramic sleeve while maintaining high sensitivity. The processed cantilever beam 13 is welded together with the optical fiber ceramic sleeve 12 by laser cladding, and then the single-mode optical fiber 11 is inserted into the optical fiber ceramic sleeve 12 and the surface of the polymer cantilever beam to form an FP interference cavi...

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Abstract

The invention relates to an optical fiber cantilever beam microphone for photoacoustic spectrum detection and a manufacturing method of the microphone. The optical fiber cantilever beam microphone comprises a single-mode optical fiber, an optical fiber ceramic sleeve, a polymer cantilever beam and an annular polymer film for detecting a photoacoustic spectrum signal. The manufacturing method includes the steps: firstly, machining the annular polymer film to form the polymer cantilever beam in a pulse laser etching mode; secondly, fixing the formed polymer cantilever beam and the optical fiber ceramic sleeve in a laser melt cladding mode; finally, forming stable FP (Fabry Perot) cavities in the end faces of the polymer cantilever beam and the single-mode optical fiber. The optical fiber cantilever beam microphone has the advantages of high integration level, small size, sensitivity in detection, intrinsic safety and the like.

Description

technical field [0001] The invention relates to a fiber optic cantilever beam microphone for photoacoustic spectrum detection and a manufacturing method thereof, which can be used for simultaneously detecting trace gases of different components, and is suitable for detecting toxic and harmful gases in industrial processes. Background technique [0002] The development of gas detection technology has important practical significance in the fields of air pollution monitoring, human daily life, industrial process control and human disease diagnosis. In recent years, with the development of industrial modernization, environmental changes have become increasingly complex, and people's awareness of environmental health is also increasing. Various toxic and harmful gas monitoring technologies are not only related to industrial and agricultural production, but also related to the health and life safety of human beings themselves, so they have attracted more and more researchers' att...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/17G01N21/31
Inventor 李俊董凤忠韩荦
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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