Method and device for detecting equipment precision, electronic equipment and storage medium
A technology for testing equipment and equipment, which is applied to devices, a method for testing equipment accuracy, electronic equipment and storage media, can solve problems such as large human workload, and achieve the effect of reducing human workload
Active Publication Date: 2022-04-08
上海赛美特软件科技有限公司
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Problems solved by technology
[0003] The inventor found in the research that in the prior art, it is necessary to manually participate in the accuracy of the test equipment, record and analyze the test data manually, and obtain the accuracy of the equipment. When there are many, it is necessary to check one by one, and the human workload is relatively large
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[0052] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It should be understood that the appended The figures are only for the purpose of illustration and description, and are not used to limit the protection scope of the present application. Additionally, it should be understood that the schematic drawings are not drawn to scale. The flowcharts used in this application illustrate operations implemented in accordance with some embodiments of the application. It should be understood that the operations of the flowcharts may be performed out of order, and steps that have no logical context may be performed in reverse order or concurrently. In addition, those skilled in the art may add one or more other operations t...
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The invention provides a method and a device for detecting equipment precision, electronic equipment and a storage medium. The method comprises the following steps: determining to-be-detected equipment in a test request, a first process line for detecting each to-be-detected equipment and a test piece bound for each first process line; for each test piece, controlling each device in the first process line to process the test piece to obtain a first processing result; if the first processing result does not meet the preset precision requirement, replacing a first process line corresponding to the first processing result with a second process line containing the to-be-detected equipment; binding a second test piece for each second process circuit; each device in a second process line bound with the second test piece is controlled to process the second test piece, and a second processing result is obtained; and determining the processing precision of the to-be-detected equipment according to the first processing result and the second processing result. According to the method, the equipment can be automatically tested, and the equipment precision can be determined according to the test data.
Description
technical field [0001] The present application relates to the technical field of chip manufacturing, and in particular, relates to a method, device, electronic device and storage medium for detecting the accuracy of equipment. Background technique [0002] With the continuous development of integrated circuit manufacturing technology, the feature size of chips is getting smaller and smaller, so the requirements for chip processing and manufacturing are getting higher and higher, which requires the equipment used to process chips to have higher accuracy and precision. The higher the accuracy, the higher the chip manufacturing process that can be achieved. In the existing chip manufacturing process, after updating, maintaining, and adjusting the parameters of the device, it is usually necessary to use the device as the device to be tested and reconfirm the device. The accuracy of the device under test. Therefore, according to the current accuracy of the equipment to be tested...
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Inventor 戎迪
Owner 上海赛美特软件科技有限公司