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Automatic silicon wafer degumming machine with cleaning device

A technology of cleaning device and degumming machine, which is applied in the field of degumming machine, can solve problems such as inability to recycle, waste resources, affect the quality of silicon wafer products, etc., and achieve the effect of convenient loading and unloading and avoiding waste

Pending Publication Date: 2022-04-15
江苏德润光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Most of the existing silicon wafer cleaning baskets use mesh baskets. During the cleaning process, silicon wafers may collide with each other, resulting in scratches or damage on the surface of silicon wafers, which will affect the product quality of silicon wafers and cause degumming. The efficiency is poor, and the existing water for degumming silicon wafers is often used for one-time use, which cannot be recycled, wastes resources and is not environmentally friendly

Method used

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  • Automatic silicon wafer degumming machine with cleaning device
  • Automatic silicon wafer degumming machine with cleaning device
  • Automatic silicon wafer degumming machine with cleaning device

Examples

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Effect test

Embodiment 1

[0023] see figure 1 , the present invention provides a technical solution: an automatic silicon wafer degumming machine with a cleaning device, comprising a main body 1 of the degumming machine, three groups of working windows are provided on the front side wall of the main body 1 of the degumming machine, and the front side walls of the three groups of working windows all pass through The rotating shaft is connected with a rotating door 26, and the left side wall of the degumming machine main body 1 is provided with a controller 27. There are three groups of degumming tanks 1 inside the degumming machine main body 1, and the three groups of degumming tanks 1 are located directly behind the working window, which is convenient for the staff. To carry out the work, three groups of degumming tanks 1 are set up to clean and degumming multiple groups of silicon wafers at the same time. Filter assembly 13, degumming tank body 1 rear side wall is provided with mounting frame 12, and ...

Embodiment 2

[0030] refer to figure 2 , This embodiment is different from the first embodiment in that: the circulating filter assembly 13 includes a filter box 16 provided on the rear side wall of the degumming tank body 1, and a water pump 15 is provided on the left side wall of the filter box 16, and the water pump 15 takes in water One end of the suction pipe 14 is connected with the inside of the degumming tank body 1, and the water outlet of the water pump 15 is connected with the inside of the filter box 16. Two groups of filter screens 17 are arranged in the filter box 16, and the right side of the filter box 16 The side wall is provided with a water delivery pump 18, the water inlet of the water delivery pump 18 is connected with the inside of the filter box 16, the water outlet of the water delivery pump 18 is connected with the inside of the degumming tank 1, and the water in the degumming tank 1 is removed under the action of the water pump 15. The liquid is pumped into the fi...

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Abstract

The invention discloses an automatic silicon wafer degumming machine with a cleaning device in the technical field of degumming machines, and the automatic silicon wafer degumming machine comprises a degumming machine main body, three groups of working windows are formed in the front side wall of the degumming machine main body, heating plates are arranged on the left side wall and the right side wall in a degumming tank body, a circulating filtering assembly is arranged on the rear side wall of the degumming tank body, and a mounting frame is arranged on the left side wall of the degumming tank body; mounting plates are arranged at the top of the mounting frame, the outer wall of the winding roller is sleeved with a rope, the free end of the rope is connected with a connecting rope, hooks are arranged at the two ends of the connecting rope, a placing frame is arranged above the degumming tank body, and mounting rings matched with the hooks are hinged to the front side and the rear side of the top of the placing frame. The silicon wafers are placed on the placing plates, the rope drives the placing frame to enter the degumming tank body, feeding and discharging are facilitated, meanwhile, under the action of the multiple sets of placing plates, the silicon wafers are prevented from colliding during degumming and cleaning, and the problem that the silicon wafers are prone to colliding during degumming and cleaning of an existing cleaning basket is solved.

Description

technical field [0001] The invention relates to the technical field of degumming machines, in particular to an automatic silicon wafer degumming machine with a cleaning device. Background technique [0002] The cleanliness of the silicon wafer surface is a key factor affecting the qualified rate of silicon wafers and the conversion efficiency of cells. In order to obtain silicon wafers with high cleanliness, silicon wafers often need to be degummed and finely cleaned after wire cutting. Therefore, for a There is an increasing demand for an automated silicon wafer debonding machine. [0003] Most of the existing silicon wafer cleaning baskets use mesh baskets. During the cleaning process, silicon wafers may collide with each other, resulting in scratches or damage on the surface of silicon wafers, which will affect the product quality of silicon wafers and cause degumming. The efficiency is poor, and the existing water for degumming silicon wafers is often used for one-time ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/10B08B3/14B08B13/00H01L21/67
Inventor 蔡鹏何飞洪布双
Owner 江苏德润光电科技有限公司