Crystal oscillator disc structure and use method thereof

Abstract

The invention relates to the technical field of OLED (Organic Light Emitting Diode) preparation, and discloses a crystal oscillator disc structure and a use method thereof, the structure comprises a shell, a disc body and a driving assembly; the disc body comprises an inner circle and an outer ring; the driving assembly comprises a first driving device and a second driving device, the first driving device is used for driving the inner ring to rotate, and the second driving device is used for driving the outer ring to rotate; the first surface of the inner circle is provided with a plurality of crystal oscillation sheets, the second surface of the inner circle is provided with a plurality of first electrodes, and the plurality of first electrodes and the plurality of crystal oscillation sheets arranged on the first surface of the inner circle are arranged in a one-to-one correspondence manner; the first surface of the outer ring is provided with a plurality of crystal oscillation sheets, the second surface of the outer ring is provided with a plurality of second electrodes, the plurality of second electrodes are arranged in one-to-one correspondence with the crystal oscillation sheets arranged on the first surface of the outer ring, and the first electrode and the second electrodes are used for simulating data transmission; the disc body is installed on the shell, the shell is provided with a through hole, and the through hole is used for exposing a crystal oscillator piece located on the inner circle and / or a crystal oscillator piece located on the outer ring.

Description

technical field [0001] The invention relates to the technical field of OLED preparation, in particular to a crystal oscillator plate structure and a use method thereof. Background technique [0002] With the development of science and technology, Organic Light Emitting Diode (OLED) display is a hot research technology in various fields. [0003] In the OLED preparation process in the prior art, the vapor deposition machine heats the material into atoms or atomic groups through the evaporation source, and deposits the material on the glass substrate to form a film layer through a certain free path. In this process, in order to ensure the film layer Uniformity and target film thickness need to monitor the rate during the evaporation process, so as to effectively regulate; the film thickness controller in the film thickness control system uses the piezoelectric effect of the crystal oscillator to measure the oscillation frequency of the crystal oscillator The change of the dig...

AI Technical Summary

Problems solved by technology

Each detection probe is equipped with a crystal oscillator plate, and there are 10 crystal oscillator plates on each plate, which are distributed on the plate in a circular direction. There is only one round hole on the plate, so that a crystal oscillator is exposed, which is used as the current crystal oscillator; and the crystal oscillator is used as a consumable, and its life will gradually be exhausted with the accumulation of materials on the crystal oscillator during the process. If the detection effect drops, you need to switch to the next crystal oscillator

[0004] However, after switching to the next crystal oscillator, since the initial rate of the new crystal oscillator is 0, it will take time before reaching the actual rate of the current process, and the rate at this time cannot be monitored, and the film forming process cannot be performed. As a result, normal production cannot be performed during this period; for some special materials, such as magnesium (Mg), ytterbium (Yb) and other metal materials, the crystal oscillator needs to be pre-formed in advance before monitoring its rate, so that it can be used in the process Monitor the rate smoothly without abnormal fluctuations. At present, only one crystal oscillator can be pre-filmed at a time, and a 200-hour production requires about 4 crystal oscillators, resulting in longer production preparation time and less time available for production.

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