Automatic optimization method, system and medium of a seed caliber processing technology

Abstract

The invention is applicable to the field of optical processing technology, and provides an automatic optimization method, system and medium of sub-aperture processing technology. The automatic optimization method of sub-aperture processing technology includes the following steps: obtaining effective removal rate spectra of different removal functions, and the effective removal The rate spectrum is the convergence rate of the error volume of each spatial frequency corrected by the removal function; the volume spectral density function of the optical element is obtained, and the volume spectral density function is the density of the residual error material volume contained in the surface shape error of the optical element at each frequency; The optimal processing technology is obtained through the effective removal rate spectrum and the volume spectral density function. The automatic optimization method, system and medium of the sub-diameter processing technology provided by the invention have the advantages of high processing efficiency and low production cost.

Description

Method, system and medium for automatic optimization of sub-caliber processing technology technical field The present invention relates to the technical field of optical processing, especially relate to a kind of automatic optimization method of sub-caliber processing technology. Laws, systems and media. Background technique [0002] The sub-caliber polishing technology was proposed by the American R.A.Jones in the 1960s, and its basic principle is to use far less The tool for the diameter of the component removes local materials by controlling the dwell time through numerical control technology, combined with high-precision surface shape detection and iterative processing. To achieve error convergence, the surface error RMS of large-diameter optical components can be obtained to be better than 0.01μm. Due to its high precision and high determinism The advantages of sub-caliber polishing technology are widely used in the final precision modification stage of ultra-pre...

AI Technical Summary

Problems solved by technology

[0006] To sum up, none of the automatic optimization methods of sub-aperture processing technology in the prior art can solve the problem of failing to combine the surface shape error distribution of the current component to obtain the most suitable process parameters (removal function) for the current component in actual processing. Severely reduces the overall efficiency of sub-aperture polishing

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