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Automatic pin inserting method and device for semiconductor probe card, computer and storage medium

A probe card, semiconductor technology, applied in the direction of single semiconductor device testing, calculation, measurement devices, etc., can solve the problems of inconsistent standards, inconsistent state, slow start and so on

Pending Publication Date: 2022-05-10
MAXONE SEMICON CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The present invention provides a semiconductor probe card automatic pin insertion method, device, computer equipment and storage medium. Unification, unstable state, uncontrollable quality, etc.

Method used

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  • Automatic pin inserting method and device for semiconductor probe card, computer and storage medium
  • Automatic pin inserting method and device for semiconductor probe card, computer and storage medium
  • Automatic pin inserting method and device for semiconductor probe card, computer and storage medium

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0125] Embodiment 1 of the present invention proposes an automatic needle insertion method for a semiconductor probe card, which is used for automatic needle insertion of a probe card. The probe card includes a first-layer probe card and a second-layer probe card arranged up and down. , the probe card of the first layer and the probe card of the second layer have corresponding probe card hole positions one by one; the method includes the following steps:

[0126] (1) Match the probe and the probe card hole position

[0127] Obtain the probe position information on the feeding probe disc and the probe card hole position information of the probe card respectively; according to the probe position information of the feeding probe disc and the probe card hole position information, analyze the matching probe and the probe card hole position information. The corresponding position coordinates of the probe card hole position;

[0128] (2) Insert the probe

[0129] Grab the probe and...

Embodiment 2

[0162] Embodiment 2 of the present invention proposes an automatic needle insertion device for a semiconductor probe card, the device comprising:

[0163] The feeding module 1 is used to place the feeding probe tray 11;

[0164] The probe card placement module 2 is used to place the probe card to be inserted, and the probe card has a first layer of probe cards 91 and a second layer of probe cards 92;

[0165] The probe card shaking module 3 is used to drive the probe card to move up and down, left and right, and front and back to perform displacement shaking;

[0166] The first position information acquisition module 4 is used to acquire the probe position information of the loading probe tray 11, the information of the probe hole position 90, and the horizontal relative position information of the probe and the probe hole position 90;

[0167] The probe grabbing module 5 is used to grab the probes on the feeding probe tray 11 and insert the probes into the probe card;

[0168...

Embodiment 3

[0189] In three aspects, the embodiment of the present invention proposes a computer device based on an automatic pin insertion method for a semiconductor probe card. The computer device includes a memory, a processor, and a computer program stored on the memory and operable on the processor. When the processor executes the computer program, the above-mentioned steps of the method described in the first aspect of the present invention are realized.

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PUM

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Abstract

The invention discloses an automatic pin insertion method and device for a semiconductor probe card, computer equipment and a storage medium, and the method comprises the steps: matching a probe with a probe card hole position, inserting the probe, adjusting the position of the probe card, and executing pin insertion. The positions of the probe and the probe card can be adjusted by controlling the displacement and jittering of the probe card, and then the probe falls down; the device comprises a feeding module, a probe card placing module, a probe card shaking module, a first position information obtaining module, a probe grabbing module, a second position information obtaining module and a PC control module. The probe card inserting device is used for automatically identifying the probes, controlling the manipulator to grab the probes, automatically adjusting the positions of the probes and putting the probes into the probe card holes, and enabling the probes which do not completely enter the probe card holes to vibrate into the probe cards by controlling displacement shaking, up-down, left-right and front-back micro-displacement shaking of the probe cards, so that manual card inserting is replaced, and the working efficiency is improved. Manpower is saved, efficiency is improved, and product quality is guaranteed.

Description

technical field [0001] The invention relates to the technical field of semiconductor chip testing, in particular to a semiconductor probe card automatic pin insertion method, device, computer equipment and storage medium for high-end probe card production. Background technique [0002] In the production process of semiconductor chips, it is necessary to use a probe card to conduct electrical testing on the chip on the wafer. The probe card is used as a connector between the chip electrode and the tester. The probes on the probe card are in contact with the electrodes of the chip, and the performance of the chip is judged by conducting an electrical test, so as to judge whether it is passed or not. [0003] The reliability of the probe card is highly dependent on the wafer test, and with the continuous shortening of the chip manufacturing process, the demand for advanced probe cards is also increasing. Advanced probe cards are characterized by small pitch (30~50μm), high pos...

Claims

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Application Information

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IPC IPC(8): G01R31/26G01R1/073G06T7/70
CPCG01R31/26G01R31/2601G01R1/07342G01R1/073G06T7/70G06T2207/30148
Inventor 于海超徐兴光
Owner MAXONE SEMICON CO LTD