Automatic conveying device and automatic conveying method for chemical agent container

Abstract

The purpose of the present invention is to provide an automatic transport device and an automatic transport method for chemical agent containers, whereby it is possible to minimize the time consumed when an empty chemical agent container of a chemical agent supply device is replaced with a new chemical agent container. The chemical agent container automatic conveying device for implementing the same comprises: a chemical agent supply device for supplying a chemical agent accommodated in a first chemical agent container to a chemical agent use position; a waiting unit for temporarily waiting a second chemical agent container fed to the chemical agent supply device to serve as a path for transporting the first chemical agent container; a receding unit that, when the first chemical agent container that has been used up in the chemical agent supply device is transported out from the chemical agent supply device, allows the second chemical agent container to be put into the chemical agent supply device by receding the first chemical agent container; an inlet part which is provided on the inlet side of the chemical agent supply device and serves as a path through which the first chemical agent container is transported out and a path through which the second chemical agent container is fed; and a control unit that controls the conveyance of the first chemical agent container and the second chemical agent container in the waiting unit, the avoidance unit, and the entrance unit, respectively.

Description

technical field [0001] The present invention relates to an automatic chemical agent container conveying device and an automatic conveying method, and more specifically, to an automatic chemical agent container conveying device and an automatic conveying method capable of reducing the time required to put a chemical agent container into a chemical agent supply device. Background technique [0002] In general, all companies that use hazardous chemicals, such as companies that manufacture semiconductors, semiconductor devices, LCDs, OLEDs, pharmaceutical companies, and paint companies, are using various chemical agents, and ways to safely supply such chemicals are becoming diverse change. [0003] This chemical preparation is supplied in large quantities by tank lorry vehicles according to the drug, usage amount, and process characteristics, but it is also supplied in small quantities in various containers ranging from 20 liters to 1,000 liters. [0004] The chemical preparati...

AI Technical Summary

Problems solved by technology

[0010] According to the above-mentioned automatic chemical agent container conveying device of the prior art, there is a problem that the empty chemical agent container used in the chemical agent supply device is transported out, and a new chemical agent container stored in an arbitrary storage place is put into the Excessive time wasted while supplying chemicals inside the unit

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