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Wafer sorting equipment

A sorting and equipment technology, applied in sorting, sustainable manufacturing/processing, climate sustainability, etc., can solve the problems of limiting production capacity, slow sorting speed, etc., to meet sorting accuracy and efficiency requirements, sorting Choose the effect of fast speed and high work efficiency

Pending Publication Date: 2022-05-27
SHENZHEN XINSANLI AUTOMATION EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the sorting speed in the industry is relatively slow, which limits production capacity

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0069] Embodiment 1: the concrete structure of the present invention is as follows:

[0070] Please refer to the attached Figure 1-8 , A wafer sorting equipment of the present invention includes a rack 1, and the rack 1 is provided with a feeding station and a sorting station, and the sorting equipment further includes:

[0071] The feeding mechanism 2 installed at the feeding station, the feeding mechanism 2 is suspended on a shelf, and is provided with a first XYZ three-axis linkage mechanism and a crystal mounted on the first XYZ three-axis linkage mechanism. Disc clamping mechanism 25 and Bin disc clamping mechanism 26;

[0072] The wafer stage mechanism 3 has a first base (31) mounted on the rack 1, a first YZ-axis motion module mounted on the first base 31, and the first YZ-axis motion module A wafer assembly is driven and connected, and a wafer fixing mechanism 34, a light source 35 and a suction nozzle wiping device 36 are respectively installed on the wafer assembl...

Embodiment 2

[0120] The following is the working principle of the wafer sorting equipment of the present invention:

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Abstract

The invention discloses wafer sorting equipment which comprises a rack, a feeding mechanism, a swing arm mechanism, a wafer platform mechanism, a Bin disc platform mechanism, a wafer ejector pin mechanism, a Bin disc top film mechanism and a CCD alignment system. In the working process, the feeding mechanism clamps a wafer disc and places the wafer disc on the wafer platform, the feeding mechanism clamps a Bin disc and places the Bin disc on the Bin disc platform, the wafer platform mechanism moves to a CCD searching and aligning position, the CCD aligning system searches and aligns wafers, the Bin disc platform mechanism moves to a CCD aligning and detecting position, the CCD aligning system aligns and detects the wafers, and the Bin disc platform mechanism moves to the CCD aligning and detecting position. The wafer ejector pin mechanism ejects crystal grains on a wafer out, a suction nozzle on the swing arm mechanism sucks the crystal grains, the swing arm mechanism rotates, the Bin disc ejector pin mechanism ejects a Bin disc film, and the swing arm mechanism places the crystal grains on a Bin disc. The high-speed wafer sorting equipment disclosed by the invention has the characteristics of high speed, high precision, multiple applicable product types and the like.

Description

technical field [0001] The invention relates to semiconductor and miniLED processing equipment, in particular to a wafer sorting equipment. Background technique [0002] Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. It can be processed into various circuit element structures on the silicon wafer, and become an IC with specific electrical functions. product. [0003] Wafer sorting equipment is one of the key equipment in the front-end process of wafers. Due to the small size of wafers and high production capacity, there are high requirements on the picking stability and sorting speed of the equipment. There is also a great demand for sorting equipment in the miniLED industry. Since a large number of LEDs are required on a miniLED screen, there are also high requirements for the stability of equipment picking and sorting speed. At present, the sorting speed in the in...

Claims

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Application Information

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IPC IPC(8): B07C5/34B07C5/02B07C5/36H01L21/67H01L21/677H01L21/683
CPCB07C5/34B07C5/02B07C5/362H01L21/67276H01L21/67271H01L21/6838H01L21/67742H01L21/6776Y02P70/50
Inventor 胡争光师利全李小根罗东贺天文甘恩荣吴嘉睿
Owner SHENZHEN XINSANLI AUTOMATION EQUIP
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