Columnar radio frequency inductive coupling discharge plasma enhanced getter device

Abstract

The columnar radio frequency inductive coupling discharge plasma enhanced getter device comprises an air supply system, a diffuser and a vacuum cavity which are sequentially connected, a hollow cylinder with holes in the wall surface is arranged in the vacuum cavity, the upper end of the hollow cylinder with the holes in the wall surface is sealed, the lower end of the hollow cylinder is open, and the outer wall of the hollow cylinder is connected with the bottom end of the vacuum cavity in a sealed mode. An electric heating element is arranged in the hollow cylinder with the holes in the wall face, the lower end of the electric heating element extends out of the vacuum cavity from an opening in the lower end of the hollow cylinder with the holes in the wall face to be connected with an external power source, a radio frequency coupling spiral coil is arranged on the outer side of the vacuum cavity, and a vacuumizing system and an air pressure collecting system are arranged on the two sides of the upper end of the vacuum cavity respectively. A radio frequency power supply system is arranged on one side of the lower portion of the vacuum cavity, and the radio frequency coupling spiral coil supplies power through the radio frequency power supply system. The defect of long activation time of a large-volume getter in pure heating is effectively overcome through a heating and radio frequency electromagnetic field coupling mode, and the air suction rate of the getter can be improved and enhanced through plasmas generated by radio frequency discharge.

Description

technical field [0001] The invention relates to the technical field of vacuum adsorption, in particular to a columnar radio frequency inductively coupled discharge plasma-enhanced getter device. Background technique [0002] At present, many fields of industrial applications and basic scientific research need to be carried out in a vacuum environment, such as coating, heat treatment, MEMS, surface science, atomic physics, nanotechnology and semiconductor industry. For vacuum technology, the internal vacuum environment and degree of vacuum directly affect the scope of work and efficiency, especially after entering the 21st century, with the continuous improvement of various application indicators and the deepening of basic discipline research, its operation and research Different levels of high vacuum or even ultra-high vacuum are required to maintain the environment, which also puts forward higher requirements and challenges for the vacuum packaging process and the subsequen...

AI Technical Summary

Problems solved by technology

How to ensure the encapsulation and air absorption of large-volume getters is a technical problem; ②When the getter is activated by heating, its electrothermal conversion efficiency is relatively low, and it usually takes a period of time before the getter can be activated And then to absorb gas to achieve the purpose of obtaining a higher vacuum, especially for the large-volume getter material used in the enlarged industrial device, it may take longer to activate, which leads to not only the energy required for a long time Stable and continuous injection, and it is less suitable for flexible and quick activation of inhalation; ③ The getter is selective for the adsorption of some gases, and the inhalation rate will be greatly affected depending on the type of gas. At the same time, the temperature and time of getter activation are also accompanied by considerable differences. For some gases that are difficult to absorb, such as nitrogen, it often requires a high temperature of several hundred degrees Celsius to activate the getter, and the inspiratory rate after activation How to effectively increase the adsorption rate of quantitative getters for gases that are difficult to adsorb is very important

[0005] The existence of the above problems sometimes limits the comprehensive application functions of getters. It is very important to find a device that can meet the current application requirements of large volume getters and improve the activation time and adsorption rate.

Images