Device for activating large-volume getter and enhancing adsorption rate by heating and radio frequency discharge plasmas

Abstract

The invention discloses a device for activating a large-volume getter and enhancing the adsorption rate by heating and radio frequency discharge plasmas. The device comprises a vacuum chamber, a vacuumizing system assembly, an air supply system assembly, an electric heating system, a radio frequency power supply system and an air pressure acquisition system assembly. When the vacuum chamber obtains vacuum through a ball valve, a mechanical pump and other vacuum-pumping system assemblies and gas types and pressure intensity are adjusted through a gas supply source, a mass flow meter and other gas supply system assemblies, a getter placed in the hollow cylinder body with the hole in the wall surface is activated to suck gas through an electric heating system composed of an electric heating rod, a heating power supply and a ground wire; and a radio frequency power supply system consisting of a radio frequency power supply, a high-frequency coaxial line and a radio frequency coupling coilis started to generate plasmas. After plasma generation is monitored by acquisition system components such as a vacuum gauge, a vacuum gauge display, a digital information acquisition card, a computerand the like, the air suction rate is increased.

Description

technical field

[0001] The invention belongs to the fields of thermal, electromagnetic and material applications, and in particular relates to a device for heating and radio frequency discharge plasma to activate a large-volume getter and enhance the adsorption rate Background technique

[0002] At present, industrial applications and basic scientific research in many fields need to be carried out in a vacuum environment, including coating, heat treatment, micro-electromechanical systems, surface science, atomic physics, nanotechnology and semiconductor industry. For vacuum technology, the internal vacuum environment and vacuum degree directly affect the working range and efficiency, especially after entering the 21st century, with the continuous improvement of various application indicators and the deepening of basic discipline research, its operation and research All environments require different degrees of high vacuum or even ultra-high vacuum to maintain, which also put...

Examples

Embodiment Construction

[0027]The technical solutions in the embodiments of the present invention will be clearly and completely described below in combination with the accompanying drawings in the embodiments of the present invention, and further detailed descriptions will be given, but the embodiments of the present invention are not limited thereto.

[0028] The accompanying drawing is a schematic diagram of a device for heating and radio frequency discharge plasma to activate a large-volume getter and enhance the adsorption rate, including a vacuum chamber, vacuum system components, gas supply system components, electric heating system, and radio frequency power supply system , Air pressure acquisition system components and getter.

[0029] The vacuum chamber consists of 1-hollow container; 2-the upper cover of the sealing flange at the bottom of the vacuum chamber; 3-the lower cover of the sealing flange at the bottom of the vacuum chamber; 4-graphite gasket; 5-screw; 6-nut; 7- Straight-through ...

technical field

[0001] The invention belongs to the fields of thermal, electromagnetic and material applications, and in particular relates to a device for heating and radio frequency discharge plasma to activate a large-volume getter and enhance the adsorption rate Background technique

[0002] At present, industrial applications and basic scientific research in many fields need to be carried out in a vacuum environment, including coating, heat treatment, micro-electromechanical systems, surface science, atomic physics, nanotechnology and semiconductor industry. For vacuum technology, the internal vacuum environment and vacuum degree directly affect the working range and efficiency, especially after entering the 21st century, with the continuous improvement of various application indicators and the deepening of basic discipline research, its operation and research All environments require different degrees of high vacuum or even ultra-high vacuum to maintain, which also put...

Examples

Embodiment Construction

[0027]The technical solutions in the embodiments of the present invention will be clearly and completely described below in combination with the accompanying drawings in the embodiments of the present invention, and further detailed descriptions will be given, but the embodiments of the present invention are not limited thereto.

[0028] The accompanying drawing is a schematic diagram of a device for heating and radio frequency discharge plasma to activate a large-volume getter and enhance the adsorption rate, including a vacuum chamber, vacuum system components, gas supply system components, electric heating system, and radio frequency power supply system , Air pressure acquisition system components and getter.

[0029] The vacuum chamber consists of 1-hollow container; 2-the upper cover of the sealing flange at the bottom of the vacuum chamber; 3-the lower cover of the sealing flange at the bottom of the vacuum chamber; 4-graphite gasket; 5-screw; 6-nut; 7- Straight-through ...

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