Device for Activating Bulk Getters and Enhancing Adsorption Rates with Radiofrequency Discharge Plasma

Abstract

The invention relates to a device for activating a large-volume getter by radio-frequency discharge plasma and enhancing the adsorption rate, including a vacuum chamber, a vacuum system component, a gas supply system component, a radio frequency power supply system and an air pressure collection system component. When a certain vacuum is obtained in the vacuum chamber through the vacuum pumping system components such as ball valves and mechanical pumps, the gas supply system components such as the gas supply source and the mass flow meter are used to adjust the gas type and pressure. Turn on the radio frequency power supply system composed of radio frequency power supply, high frequency coaxial line and radio frequency coupling coil to generate plasma, and monitor the pressure change in the chamber through vacuum gauge, vacuum gauge display, digital information acquisition card and computer and other acquisition system components. The plasma effectively activates the getter inside the hollow cylinder with holes on the wall and increases the getter rate.

Description

technical field [0001] The invention belongs to the field of electromagnetic and material applications, and in particular relates to a device for activating a large-volume getter by radio-frequency discharge plasma and enhancing the adsorption rate Background technique [0002] At present, industrial applications and basic scientific research in many fields need to be carried out in a vacuum environment, including coating, heat treatment, micro-electromechanical systems, surface science, atomic physics, nanotechnology and semiconductor industry. For vacuum technology, the internal vacuum environment and vacuum degree directly affect the working range and efficiency, especially after entering the 21st century, with the continuous improvement of various application indicators and the deepening of basic discipline research, its operation and research All environments require different degrees of high vacuum or even ultra-high vacuum to maintain, which also puts forward higher r...

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Problems solved by technology

[0006] The present invention is made in view of the above facts, mainly to meet the application requirements of large-volume getters in large and medium-sized industrial devices, and to solve the problems of long activation time of traditional heating getters and slow adsorption rate of some gases. , the purpose of which is to provide a radio frequency discharge plasma to activate a large volume getter and enhance the adsorption rate device

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