Piezoelectric type electrostatic chuck

Abstract

The piezoelectric type electrostatic chuck comprises electrodes, a ceramic plate and an aluminum substrate, the ceramic plate is arranged on the aluminum substrate, the electrodes are arranged on the ceramic plate and the aluminum substrate, and a piezoelectric module is jointly arranged between the ceramic plate and the aluminum substrate. The piezoelectric module comprises a central piezoelectric module, a transition piezoelectric module, a peripheral piezoelectric module and an edge piezoelectric module, and the central piezoelectric module, the transition piezoelectric module, the peripheral piezoelectric module and the edge piezoelectric module are all arranged between the ceramic plate and the aluminum substrate. When the piezoelectric type electrostatic chuck is used, the central piezoelectric module, the transition piezoelectric modules, the peripheral piezoelectric modules or the edge piezoelectric modules drive capacitance response in a radio frequency circuit in an electrode to influence plasmas by mechanical energy in a liquid pressure changing mode, so that the radio frequency circuit is more stable, and the piezoelectric type electrostatic chuck is more stable in performance. Therefore, the effect that the piezoelectric type electrostatic chuck can be continuously stable when being used is achieved.

Description

technical field [0001] The invention relates to the technical field of suction cups, in particular to a piezoelectric electrostatic suction cup. Background technique [0002] Electrostatic chuck is a general term for ultra-clean sheet carrier, grabbing and handling equipment suitable for atmospheric or vacuum environments. The structure diagram of the existing electrostatic chuck is as follows figure 1 As shown, its main components are: electrode 1, ceramic plate 2 and aluminum substrate 3, wherein ceramic plate 2 is fixed on aluminum substrate 3, electrode 1 is arranged on ceramic plate 2 and aluminum substrate 3, and aluminum substrate 3 is the electrical signal In the place of input, in actual use, the electrostatic chuck drives the plasma sheath in the modulation electrode 1 with an electrical signal (RF, DC). The RF power source must be equipped with a corresponding automatic matching network, which is complicated in structure and expensive. And the stability is diffi...

AI Technical Summary

Problems solved by technology

The structure diagram of the existing electrostatic chuck is as follows: figure 1 As shown, its main components are: electrode 1, ceramic plate 2 and aluminum base 3, wherein ceramic plate 2 is fixed on aluminum base 3, electrode 1 is set on ceramic plate 2 and aluminum base 3, and aluminum base 3 is an electrical signal In the place of input, in actual use, the electrostatic chuck drives the plasma sheath in the modulation electrode 1 with electrical signals (radio frequency, direct current), and the radio frequency power source must be equipped with a corresponding automatic matching network, which has a complex structure and is expensive. And the stability is difficult to control; in addition, although the DC source control method needs a matching network, the structure is simple, but it is easy to cause the power of the RF loop to be unstable

To sum up, whether it is a radio frequency power source or a DC source to control the electrostatic chuck, it will cause the electrostatic chuck to be unstable, and the electrostatic chuck cannot continue to move objects stably.

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