Roller chain tray conveying drying furnace
A technology of tray conveying and drying furnace, applied in the field of drying furnace, can solve the problems of heat dissipation outside the equipment, low efficiency, affecting drying effect, etc., to achieve the effect of increasing the number of conveying, reducing cost and reducing heat loss
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Embodiment 1
[0030] like Figure 1 to Figure 5 As shown, in this embodiment, a drying furnace conveyed by a rolling chain tray includes a conveying flower basket 1, an upper drying area 2 and a lower return area 3, and the front end of the upper drying area 2 and the upper drying area 2 The rear ends are equipped with chain gears 4, and a double-pitch mesh chain 5 is connected to the chain gears 4. The double-pitch mesh chain 5 is provided with a positioning tray 6 and an auxiliary installation piece 7. The auxiliary installation piece 7 is connected with the double pitch. The net chain 5 is integrally formed, the side of the positioning tray 6 is fixedly connected with the auxiliary mounting piece 7, the positioning tray 6 is provided with a positioning column 8, and the bottom of the conveying flower basket 1 is provided with a positioning hole 9, and the positioning column 8 is inserted into the positioning hole 9. The front end of the drying area 2 and the rear end of the upper drying ...
Embodiment 2
[0040] The difference between this embodiment and the first embodiment is that:
[0041] like Figures 6 to 8 As shown, in this embodiment, a nitrogen system 34 ( Figure 8 The direction of the arrow in the middle is the flow direction of nitrogen), and nitrogen is used to protect the silicon wafer. The nitrogen system 34 includes a combustion tower 35, an electronically controlled air valve adjustment switch 36, a nitrogen sampling pipe 37 and a nitrogen injection pipe 38. The furnace part has a nitrogen injection pipe 38, and the part of the nitrogen injection pipe 38 is connected to the interior of the upper drying zone, wherein the front section of the upper drying zone is the isolation zone chamber 39, and the middle section of the upper drying zone is the constant temperature zone chamber 41 and The chamber 40 in the preheating zone, the chamber 42 in the transition zone at the rear of the upper drying zone, and the upper drying zone are equipped with a plurality of set...
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