Triaxial accelerometer
A technology of axial acceleration and accelerometer, applied in the field of inertial measurement, can solve the problem of inaccurate measurement of three-axis accelerometer, and achieve the effect of solving inaccurate measurement
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Embodiment 1
[0035] This embodiment provides a three-axis accelerometer. like Figures 1 to 9 As shown, the three-axis accelerometer includes three accelerometers, an analog circuit and a digital circuit; wherein, the analog circuit includes: a signal acquisition circuit for collecting acceleration information through the three accelerometers, and converting the collected acceleration The information is converted into a voltage signal; the signal conversion circuit is used to convert the voltage signal into an analog quantity. The digital circuit includes: a digital signal processing circuit 46 for converting the analog quantity into a digital quantity; and an output signal converting circuit 48 for converting the digital quantity into an RS-422 signal and outputting it.
[0036] Through the above structure, the analog circuit and the digital circuit are separated, so that the measurement of the three-axis accelerometer is more accurate.
[0037] The three accelerometers include an X-axi...
Embodiment 2
[0045] This embodiment provides a three-axis accelerometer, such as Figures 1 to 9 As shown, the three-axis accelerometer includes an X-axis signal acquisition circuit 12, an X-axis accelerometer 13, an X-axis signal conversion circuit 11, a Y-axis signal acquisition circuit 22, a Y-axis accelerometer 23, a Y-axis signal conversion circuit 21, Z-axis signal acquisition circuit 32 , Z-axis accelerometer 33 , Z-axis signal conversion circuit 31 , power module 42 , serial port isolation circuit 44 , digital signal processing circuit 46 , output signal conversion circuit 48 and base plate 50 .
[0046] The bottom plate 50 includes a support body 503, the support body 503 includes two double L-shaped beams 502, and the two double L-shaped beams 502 are used for fixing three hoisting cylinders 501, wherein the three hoisting cylinders 501 are used for fixing The three accelerometers are hoisted: the X-axis accelerometer 13 , the Y-axis accelerometer 23 and the Z-axis accelerometer ...
Embodiment 3
[0077] The structure of the three-axis accelerometer in this embodiment is similar to that in Embodiments 1 and 2, and the difference lies in the specific structure of the accelerometer on each axis.
[0078] like Figure 10 As shown, each accelerometer is composed of an elastic element and a sensitive element, the elastic element is composed of four hollow beams 60, two middle beams 61 and two mass blocks 62, and the sensitive element is composed of a plurality of piezoresistors. The vertical arm of each hollow beam 60 is hollow, forming two beam arms. The two masses 62 are connected by two middle beams 61, and then a piezoresistive accelerometer with hollow beams 60 is formed on the silicon insulator wafer.
[0079] The varistors are arranged on the four hollow beams 60 and the two middle beams 61 . The varistors Rx1 and Ry1 are respectively arranged on the beam arms lx1 and lx2 of the hollow beam; the varistors Rx2 and Ry3 are respectively arranged on the beam arms lx2 an...
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