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Needle-card adjusting device for planarizing needle sets on a needle card

A calibration device and stylus technology, applied in the direction of measuring devices, measuring leads/probes, components of electrical measuring instruments, etc., can solve problems such as high cost and time overhead, inability to achieve accuracy, and inability to calibrate

Inactive Publication Date: 2005-04-13
INFINEON TECH AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] For the contact pin groups glued on the contact blade, calibration has hitherto not been possible, or can only be calibrated by subsequently bending each contact pin, which at the required accuracy of 1 / 4 micron means extremely high costs and time overhead
If the stylus set is set on a so-called space transformer, it can be calibrated with the help of a simple screw, but the given accuracy is hardly achieved

Method used

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  • Needle-card adjusting device for planarizing needle sets on a needle card
  • Needle-card adjusting device for planarizing needle sets on a needle card
  • Needle-card adjusting device for planarizing needle sets on a needle card

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0019] figure 1 Shown is a contact pin blade 1 which is fastened with screws 4 between a printed circuit board 3 and a window of a reinforcement 2. The function of the printed circuit board 3 is to serve as a contact interface for connecting the test head 5 , by means of which the test head 5 can transmit the test signal to each contact pin 6 of the contact pin sheet 1 .

[0020] figure 2 The structure of a contact pin 6 is shown, wherein the contact pin 6 is in contact with a contact 7 of a chip 8 on the wafer.

[0021] The electrical connection between the test head 5 and the printed circuit board 3 is represented by the connection bus 9 , while the connection between the printed circuit board 3 and the respective contact pins 6 is made by the connection lines 10 .

[0022] The screw 4 is a mechanical alignment device, since by turning this screw fine adjustment of the parallelism between the chip surface contacted by the contact pin blade 1 and the contact pin 6 can be m...

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PUM

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Abstract

The invention relates to a stylus calibration device for the flattening of a stylus group of a stylus (1), wherein the stylus (1) is passed through a dedicated dynamically operating calibration unit (4; 11) It is connected to a printed circuit board (3) as a contact interface to the test head (5).

Description

technical field [0001] The present invention relates to a calibrating device for a stylus sheet, which is used for the flattening of a stylus group of a stylus sheet (also called a special sheet) on a contact wafer, wherein the stylus sheet is connected with a contact which serves as a contact leading to a test head. interface to the printed circuit board. Background technique [0002] German patent document DE 2544735 A1 discloses a test head holder with which the spacing between individual test heads with test tips can be adjusted. The purpose is to match the test head to the different shrinkage rates of the ceramic substrate. [0003] In addition, an automatic leveling system for a test piece is disclosed in US Patent Document US5861859, wherein to adjust the test piece relative to the wafer surface, firstly, 3 needle tips of the test piece are aligned with the wafer surface, wherein the two needle tips are aligned with the wafer surface. Height is variable. [0004] T...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R1/073G01R31/28H01L21/66G01R1/06G01R3/00H01L41/09
CPCG01R3/00G01R31/2887H01L22/00
Inventor M·昆德
Owner INFINEON TECH AG