Transfer device for semiconductor device in processor
A technology for transporting devices and semiconductors, which is applied in the field of transporting semiconductor devices and picking up, and can solve problems such as polluting semiconductor devices
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[0027] Preferred embodiments of the present invention shown in the accompanying drawings will be described in detail below. The same components in each drawing are denoted by the same reference numerals as much as possible.
[0028] In the following description, the structure of a handler to which the semiconductor device transfer apparatus of the present invention is applied is the same as that of a conventional handler, and details thereof are omitted.
[0029] figure 2 It is a perspective view of the first embodiment of the semiconductor device transfer device of the present invention, image 3 for figure 2 Perspective view of the picker drive of the conveyor shown, Figure 4A with 4B It is a plan view illustrating the operation of the semiconductor device transfer apparatus of the present invention.
[0030] Two rectangular frames 101 are fixed on movable frames 14a and 14b (see FIG. 1 ). The stators 102a and 104a and movers 102b and 104b of the two linear motors 102...
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