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Transfer device for semiconductor device in processor

A technology for transporting devices and semiconductors, which is applied in the field of transporting semiconductor devices and picking up, and can solve problems such as polluting semiconductor devices

Inactive Publication Date: 2005-08-03
MIRAE CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the dust raised by belts and pulleys can contaminate semiconductor devices

Method used

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  • Transfer device for semiconductor device in processor
  • Transfer device for semiconductor device in processor
  • Transfer device for semiconductor device in processor

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Experimental program
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Embodiment Construction

[0027] Preferred embodiments of the present invention shown in the accompanying drawings will be described in detail below. The same components in each drawing are denoted by the same reference numerals as much as possible.

[0028] In the following description, the structure of a handler to which the semiconductor device transfer apparatus of the present invention is applied is the same as that of a conventional handler, and details thereof are omitted.

[0029] figure 2 It is a perspective view of the first embodiment of the semiconductor device transfer device of the present invention, image 3 for figure 2 Perspective view of the picker drive of the conveyor shown, Figure 4A with 4B It is a plan view illustrating the operation of the semiconductor device transfer apparatus of the present invention.

[0030] Two rectangular frames 101 are fixed on movable frames 14a and 14b (see FIG. 1 ). The stators 102a and 104a and movers 102b and 104b of the two linear motors 102...

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PUM

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Abstract

Disclosed is an apparatus for transferring semiconductor devices in a semiconductor device enabling to simplify the structure for varying pickers for picking up semiconductor devices as well as accomplish fast and precise variation, of the pickers, and includes rectangular frames installed movably on a handler body, stators of two linear motors installed on inner sides of two of the frames adjacent, respectively, movers of the two linear motors installed to move along the stators, respectively, a reference pickup member fixed to an inner corner between the frames to pick up the semiconductor device, first and second pickup members coupled with the movers of the linear motors to move along the frames, respectively, a first guide member fixed to the first pickup member to be in parallel with the frame, a second guide member fixed to the second pickup member to be vertical the first guide member, and a third pickup member coupled with both of the first and second guide members to move along the second and first guide members by movements of the first and second pickup members.

Description

[0001] This application claims priority from Korean Application No. P2001-80160 filed on December 17, 2001, the contents of which are incorporated herein by reference. technical field [0002] The invention relates to a device for picking up and transporting semiconductor devices in a processing machine for testing semiconductor devices, in particular to a set of devices that can correspond to a tray and vary with the type and size of semiconductor devices to be tested in a semiconductor device testing processing machine. Part A semiconductor device transfer device that changes the pitch of a picker that picks up a semiconductor device. Background technique [0003] Generally, semiconductor devices produced in a production line are tested before delivery to determine whether they are genuine or defective. [0004] A handler is a device used to test semiconductor devices. The handler automatically transfers semiconductor devices mounted on a tray to another location using a ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04C18/00F04C18/02G01R31/28H01L21/66
CPCF04C18/0215
Inventor 黄炫周黄智炫
Owner MIRAE CORPORATION