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Narrow band thermal-optically tuned Fabry-Perot filter with flattop and steep belt edge response

A flat-top response and filter technology, applied in the field of optical communication, can solve the problems of inability to meet the requirements of miniaturization, compatible integration, large drop in the middle of the flat-top response, complex filter structure, etc., achieving high reliability, easy implementation, good performance

Inactive Publication Date: 2007-02-14
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the structure of this filter is complex, requiring the formation of three symmetrical mirrors, in which the reflectivity of the two outer mirrors is the same and satisfies a critical relationship with the reflectivity of the middle mirror
In addition, the flat top response of this filter has a relatively large drop in the middle, about 20% of the maximum transmission, so it is only basically flat top
Moreover, this device is not easy to integrate with other photonic devices to achieve various complex functions, so it cannot meet the needs of miniaturization and compatible integration of practical system applications

Method used

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  • Narrow band thermal-optically tuned Fabry-Perot filter with flattop and steep belt edge response
  • Narrow band thermal-optically tuned Fabry-Perot filter with flattop and steep belt edge response
  • Narrow band thermal-optically tuned Fabry-Perot filter with flattop and steep belt edge response

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Embodiment Construction

[0048] Combine below figure 1 and figure 2 , illustrating the structure of an embodiment of the filter of the present invention.

[0049] A kind of narrow-band thermo-optic tunable Fabry-Perot filter with flat top response of the present invention, comprises:

[0050] A substrate 10, the substrate 10 is made of a single crystal silicon material, and its refractive index is, for example, 3.5;

[0051] Distributed Bragg reflector 20 below, this lower distributed Bragg reflector 20 is made on the top of substrate 10; This lower distributed Bragg reflector 20 comprises: silicon dioxide layer 21, the silicon dioxide layer 21 formed on layer 22 and a silicon dioxide layer 23 formed on the silicon layer 22; the optical thickness of the silicon dioxide layer 21, 23 is a quarter of the central wavelength, and the refractive index is, for example, 1.46; the optical thickness of the silicon layer 22 is a quarter of the central wavelength, with a refractive index of, for example, 3.5;...

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Abstract

This invention relates to thin-band thermal optical adjusting Fabry-Perot filter, which comprises the following parts: one base; one distributing Prague reflector processed on the base; one Fabry-Perot chamber process on the upper surface on the down distributing Prague reflector; one heater processed on the Fabry-Perot chamber; one upper distributing Prague reflector processed on the heater surface; one transparent window formed on the middle of the heater.

Description

technical field [0001] The invention relates to optical communication technology, in particular to a narrow-band thermo-optic tuned Fabry-Perot filter with flat top and steep band-edge response. Background technique [0002] In optical communication networks, tunable filters are used to form various demultiplexers to separate the multiplexed light; applying this tunable filtering technology to lasers and detectors can realize dense wavelength division multiplexing It is an important tunable light source and receiver in multiplexing (DWDM); the key device of the new generation of all-optical network, the optical add-drop-demultiplexer (OADM), can also be composed of this filter. It can be seen that the tunable filter has become an indispensable and important device in the all-optical network and DWDM system. The application of the filter in the optical network includes the differential detection of channel light. In addition to the narrow band and tunable filter, it is also ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04B10/12H04B10/02G02B6/24
Inventor 蔡晓左玉华王启明
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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