High purity gallium nitride nanometer line preparation method
A gallium nitride nanowire and high-purity technology, which is applied in the field of preparation and generation of inorganic compound semiconductor materials, can solve problems that affect product purity and yield, easily generate by-products, and lengthen the preparation cycle.
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[0107] All preparation equipment is in quasi-working state;
[0108] Accurately weigh according to the ratio, measure 1 g of gallium nitride and 2,600 cm of ammonia 3 , Argon 9000 cm 3 , 20ml acetone, 20ml absolute ethanol, 140ml deionized water;
[0109] Grinding and sieving: The gallium oxide is repeatedly ground and sieved to form a fine powder with a 300 mesh screen;
[0110] Ultrasonic cleaning of silicon plates: 20 ml of acetone, 20 ml of absolute ethanol, 40 ml of deionized water;
[0111] Ultrasonic cleaning quartz raw material boat: 100ml deionized water;
[0112] Drying treatment: the silicon plate and quartz raw material boat are dried in a drying box at a temperature of 50℃±3℃;
[0113] Place raw materials, silicon plates, and quartz raw materials boat: the fine gallium oxide powder is placed in the quartz raw material boat, the quartz raw material boat is placed in the high temperature zone of the tubular high temperature furnace, and the silicon plate is placed in th...
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