Electrostatic discharge protector
An electrostatic discharge protection and device technology, applied in the field of transistors
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[0064] like Figure 2A to Figure 2C Shown is a schematic plan view of an ESD protection device of the first embodiment of the present invention; Figure 3A to Figure 3C shown, respectively, corresponding to Figure 2A to Figure 2C Schematic cross-sectional view of the ESD protection device in .
[0065] Please also refer to Figure 2A and Figure 3A , the manufacturing method of the ESD device, firstly, an oxide layer 100 and a polysilicon layer 102 are sequentially formed on the P-type silicon substrate 104 . Then please refer to Figure 2B and Figure 3B , performing a lithography process to form polysilicon islands 106 , 108 , 110 , 112 and polysilicon gates 114 , 116 . Then please refer to Figure 2C and Figure 3C , perform an ion implantation step 118 to form an N+ doped region 120 , wherein the N+ doped region 120 includes an N+ drain doped region 122 and an N+ source doped region 124 .
[0066] like Figure 2B and Figure 2C As shown in , the polysilicon isl...
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