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Moving loading device for plate shape substrates and its storing device

A technology of storage device and loading device, which is applied in the direction of packaging, transportation and packaging, and stacking of objects, etc. It can solve the problems of deformation or damage of sheet substrates, achieve the effects of preventing deformation or damage, reducing insertion space, and improving rigidity

Inactive Publication Date: 2003-01-29
HITACHI LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] The present invention is made in view of the problems of the above-mentioned conventional sheet substrates, and an object thereof is to provide a sheet substrate capable of reducing the amount of bending due to its own weight, such as a large glass substrate, thereby preventing the sheet substrate from being caused by bending stress. Deformation or breakage, etc., sheet-shaped substrate moving loading device and its storage device

Method used

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  • Moving loading device for plate shape substrates and its storing device
  • Moving loading device for plate shape substrates and its storing device
  • Moving loading device for plate shape substrates and its storing device

Examples

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Embodiment Construction

[0035] Next, according to the drawings, the moving loading device and storage device for sheet substrates of the present invention will be introduced by taking glass substrates as moving and loading objects as an example.

[0036] Figure 1 ~ Figure 2 A moving loading device and a storage device for sheet substrates according to a first embodiment of the present invention are shown.

[0037]This mobile loading device for sheet substrates is a device used in conjunction with other mobile loading devices, and its structure is to extend from the left and right side walls 2a, 2b of the box-shaped box main body 1 as a storage device to opposite directions. A plurality of parallel support members 3a, 3b simultaneously lifts and lowers the robot arm 4 of the mobile loading device 40 inserted into the cassette main body 1 between the support members 3a, 3b to take out and put in the glass substrate 5.

[0038] And, the moving loading device of the sheet substrate like this embodiment...

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PUM

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Abstract

The objective of the present invention is to provide a transfer device for substrate capable of preventing deformation or breakage of substrate due to bending stress, by reducing the amount of dead weight deflection of substrate, such as large mother glass boards, etc. Also, on this transfer device for substrate, provided with supporting members in opposite directions disposed in extension from two sides of a storage device, and designed in such a way as to introduce or remove substrate by raising and lowering the hand of a transfer machine inserted into the storage device between said supporting members, said supporting members are comprised of a plurality of supporting members in parallel formed with a gap between the supporting members facing each other and that said hand is comprised of a plurality of transversal hand supporting members in the direction of breadth positioned between said parallel supporting members, and of a longitudinal hand supporting member in the direction of length, positioned between said supporting members facing each other, and connecting said transversal hand supporting members, at the lifting position of the hand.

Description

technical field [0001] The present invention relates to a moving and loading device for sheet substrates, and more particularly to a sheet substrate capable of preventing deformation or damage of sheet substrates caused by bending stress by reducing the amount of bending caused by the weight of sheet substrates such as large glass substrates. The moving device of the substrate and its storage device. Background technique [0002] In order to separate and store glass substrates such as liquid crystals without contact with each other, they are stored in a storage device such as a dedicated glass substrate storage box. [0003] Such a box for storing glass substrates is used, for example, in a production line of large-scale liquid crystal glass substrates, when liquid crystal glass substrates are transported between production facilities, temporarily stored, and the like. [0004] Such as Figure 9 As shown in the box for storing glass substrates, a plurality of parallel suppo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J15/08B65G49/06B65G61/00H01L21/673H01L21/677
CPCH01L21/67766Y10S414/138B65G61/00
Inventor 珍部弘远藤嘉也岛川直树福渡一郎林田宪明高仓芳生松山章男纐缬英斗
Owner HITACHI LTD
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