Gas colume composing method of micro display
A technology of a microdisplay and a composition method, which is applied in the directions of instruments, optics, nonlinear optics, etc., can solve the problems of affecting the quality of projection images, and it is difficult to maintain the uniformity of the gap height H.
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[0019] First, see Figure 1 ~ Figure 3 as shown, figure 1 Shown is the flow chart of the composition method of the interstitial columns of the microdisplay of the present invention. In the following, the microdisplay 100 of the present invention is reflective, and the composition method of the interstitial columns includes steps 10-40, wherein:
[0020] (10) The surface of the chip is plated with a transparent non-conductive material layer. A layer of transparent non-conductive material layer 120 (such as figure 2 Shown) is carried out after the chip 110 completes the final metal reflective layer 110'. The transparent non-conductive material layer 120 is selected from the material of siOx (silicon oxide series) in the present invention, for example: SiO 2 (silicon dioxide).
[0021] (20) Pre-arrange the position of the spacer column on the mask. That is, on the photomask 200 of the microdisplay 100 corresponding to the three primary colors of red, green and blue, each ga...
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