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Bench monitoring method and system for mfg. integrated circuit

A technology of integrated circuits and monitoring systems, applied in the fields of circuits, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of monitoring methods and systems without platforms, inability to understand chip processes, losses, etc.

Inactive Publication Date: 2003-10-29
WINBOND ELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, from the above indicators, it is impossible to understand the actual process of manufacturing chips of the production machine 12 and the production machine 14.
If there are any problems in the actual manufacturing process of the chip, these problems are often hidden until the problem occurs, and it has caused large or small losses
In the above-mentioned known systems, there is no suitable machine monitoring method and system

Method used

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  • Bench monitoring method and system for mfg. integrated circuit
  • Bench monitoring method and system for mfg. integrated circuit
  • Bench monitoring method and system for mfg. integrated circuit

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Embodiment Construction

[0020] Common methods and systems for monitoring chip production are not only time-consuming, labor-intensive and error-prone, but also there is no better machine monitoring method and system. Therefore, the purpose of the present invention is to provide a machine monitoring method and system for integrated circuit manufacturing. The system uses the replay of machine events to learn about problems in the chip manufacturing process, such as figure 2 Shown. figure 2 It is a schematic diagram of the connection of the production system of the circuit part of the invention. Among them, in the integrated circuit production system, there is a control host 20 to control the actions of the production machine 22 and production machine 24 connected to it. Due to the difference in integrated circuit components, the production machine 22 and the production machine 24 are It can process machines for various semiconductor manufacturing methods. The control host 20 is connected with a number of...

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Abstract

A bench monitoring method and system for preparing IC is characterized by that the historical bench events are reproduced to probe the problems of bench. Said method includes such steps as downloading the data about bench events from database, calculating its effect index, creating control chart, and reproducing the events by the graphic computer interface to find the abnormalities.

Description

Technical field [0001] The invention relates to a monitoring method and system in an integrated circuit manufacturing plant, and in particular to a monitoring method and system for a machine in an integrated circuit manufacturing plant, that is, a monitoring method for machine events in an integrated circuit manufacturing plant, and can provide System for replay and problem response. Background technique [0002] In the integrated circuit manufacturing method, in order to improve the manufacturing quality of the chip, reduce the manufacturing cost, shorten the production cycle, etc., the integrated and automated manufacturing of the information management system is an important subject to be studied by the integrated circuit factory today. A complete computer integrated automation system roughly includes production scheduling systems, quality management systems, monitoring systems, and automation interface systems, etc. Due to the continuous innovation of integrated circuit produ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/00
Inventor 陈忠信
Owner WINBOND ELECTRONICS CORP
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