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Smart load port with integrated carrier monitoring and fad-wide carrier management system

A carrier system and management system technology, applied in the field of carrier management and operation system, can solve the problem that the carrier cannot be placed correctly

Inactive Publication Date: 2004-01-07
CROSSING AUTOMATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

On the other hand, when a carrier designated for one area is used in another area that is not compatible, the dimples on the bottom of the carrier do not match the pins on the load port, and the carrier will not sit properly on the load port

Method used

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  • Smart load port with integrated carrier monitoring and fad-wide carrier management system
  • Smart load port with integrated carrier monitoring and fad-wide carrier management system
  • Smart load port with integrated carrier monitoring and fad-wide carrier management system

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Embodiment Construction

[0055] The present invention will now be described with reference to FIGS. 1-9. In a preferred embodiment, the present invention relates to a system capable of monitoring various performance characteristics of a wafer carrier and a system for managing carrier operation on a high volume manufacturing basis. Although the monitoring system described hereinafter is shown as a loading port for a front opening interface of a front opening integrated container ("FOUP"), it should be understood that the monitoring and management system of the present invention may alternatively be used with bottom opening interfaces and The carrier is open at the bottom. Also, although the figures show a carrier for a 300mm wafer, it should be understood that the size of the carrier is not critical to the present invention, which can be used with carriers of various sizes, including carriers for transporting 200mm and 150mm wafers .

[0056] It should also be understood that the preferred embodiment ...

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Abstract

A system is disclosed capable of monitoring a plurality of performance characteristics of a wafer carrier on a load port, and to a system for managing carrier operation on a fab-wide basis.

Description

[0001] Cross References to Related Applications [0002] This application is related to U.S. Patent Application Serial No. 09 / 640463, filed August 15, 2000, by Express Mail with label No. EL622694950US, filed by Martin, and entitled "Smart Load Port with Integrated Carrier Monitoring And Fab-wide Carreir Management System", which application is incorporated herein by reference in its entirety. technical field [0003] The present invention relates to the fabrication of integrated circuits on semiconductor wafers, and more particularly to a system capable of monitoring various performance characteristics of the wafer and a system for carrier management operations on a high volume manufacturing basis. Background technique [0004] The SMIF system proposed by Hewlett-Packard Company is disclosed in US Patent Nos. 4,532,970 and 4,534,389. The purpose of the SMIF system is to reduce the flow of particles onto semiconductor wafers throughout the semiconductor manufacturing proces...

Claims

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Application Information

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IPC IPC(8): H01L21/66H01L21/00H01L21/02H01L21/673H01L21/677
CPCH01L21/67242H01L21/67265H01L21/67775H01L21/67294H01L21/67253H01L21/67379
Inventor 雷蒙德·S·马丁
Owner CROSSING AUTOMATION
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