Prepn process and device of continuously variable light attenuating plate

A technology of attenuation sheet and glass substrate, which is applied in the field of preparation and realization of optical continuous variable attenuation sheet
CN1469179AInactive Publication Date: 2004-01-21GUANGXUN SCI & TECH WUHAN
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Patent Information

Authority / Receiving Office
CN ยท China
Current Assignee / Owner
GUANGXUN SCI & TECH WUHAN
Publication Date
2004-01-21
Estimated Expiration
Not applicable ยท inactive patent

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Abstract

The present invention relates to one method and device of realizing control light change on glass substrate. One sputtering deposition baffle with special pattern for compensating target distribution is designed based on the film thickness distribution curve of sputtered target material, so that one layer of attenuating metal film with thick variation is deposited on the glass substrate. When the incident light shifts in the gradually varying film thickness direction, the intensity of the transmitted light changes continuously to realize the continuous attenuation of light. Thus prepared attenuating plate has excellent attenuation linearity. The said method may be used in preparing attenuating plate of different attenuation slope and different attenuating range, and is simple in operation and low in cost.
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Description

technical field

[0001] The invention relates to a method for realizing continuous variable light on a glass substrate and related realization devices. Background technique

[0002] The optical attenuators currently used in optical communication systems are mainly based on the following technologies: 1) electromagnetic or thermo-optic crystals, which control electrical or thermal signals to change the transmission characteristics of light, 2) placing lenses between optical fibers to change the lens 3) insert an attenuation sheet formed of a metal material between the optical fibers. For the third technology, its core component, the attenuation sheet, is generally prepared by sputtering or thermally evaporating one or more layers of metal film on a glass substrate, such as "Light attenuation element" EP0165015, MATSUMARA FUMIO In the introduction, a layer of chromium Cr film and nickel Ni film are thermally evaporated on the glass substrate respectively...

Claims

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