Gas flow sensor
A gas flow and sensor technology, applied in the direction of liquid/fluid solid measurement, measurement flow/mass flow, instruments, etc., can solve the problems of complex structure, poor measurement accuracy, low sensitivity, etc., and achieve high measurement accuracy, fast response speed, The effect of high sensitivity
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[0021] Referring to the accompanying drawings, the gas flow sensor of the present invention includes a tubular plastic shell 4, a tubular plastic inner shell 2 is inserted in the inner cavity of the outer shell 4, and a tubular plastic inner shell 2 is inserted in the inner cavity of the inner shell 2. A tubular metal inner membrane 1, the inner shell 2 is provided with 1-3 vibration cavities 5 and vibration transmission channels 6 respectively connected to each vibration cavity 5, wherein each vibration cavity 5 is along the inner circular surface of the inner shell 2 Setting, the inner casing 2 is equipped with induction diaphragms 3 that respectively block each vibration transmission channel 6, and each induction diaphragm 3 is connected with a metal post 9, and the vibration chamber 5 can be annular, semi-annular or arc-shaped , the sensing diaphragm 3 includes a varistor diaphragm, a piezoelectric diaphragm and a capacitive diaphragm, and other types of sensing diaphragms ...
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