Method of forming metal wire of LCD device

A device and metal layer technology, applied in the field of liquid crystal display devices, can solve the problems of complicated reprocessing, failure of reprocessing of LCD devices, etc.

A device and metal layer technology, applied in the field of liquid crystal display devices, can solve the problems of complicated reprocessing, failure of reprocessing of LCD devices, etc.

CN1480779AInactive Publication Date: 2004-03-10LG DISPLAY CO LTD
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  • Method of forming metal wire of LCD device
  • Method of forming metal wire of LCD device
  • Method of forming metal wire of LCD device

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Embodiment Construction

[0039] Preferred embodiments of the invention will be described in detail with reference to the examples in the accompanying drawings.

[0040] Figure 3A is an exemplary cross-sectional view illustrating a method of forming lines of an LCD device according to the present invention. Such as Figure 3A As shown in , an aluminum (pure aluminum) Al layer 22 or an aluminum alloy (AlNd) layer 22 and a molybdenum Mo layer 23 are deposited on a glass substrate 21 in sequence. In this example, the aluminum Al layer 22 may be formed in a thickness of 10 Γ… to 3000 Γ…, and the molybdenum Mo layer 23 may be formed in a thickness of 10 Γ… to 2000 Γ….

[0041] Figure 3B is an exemplary cross-sectional view illustrating a method of forming lines of an LCD device according to the present invention. Such as Figure 3B As shown in , a photoresist layer can be deposited on the entire surface of the molybdenum Mo layer 23, and a mask (not shown) is used to perform exposure and development proces...

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Abstract

A method for forming a line of an LCD device includes sequentially depositing first and second metal layers on a glass substrate, forming a mask pattern on the second metal layer, performing a first wet-etch process using a mixed acid solution as an etchant on the first and second metal layers with the mask pattern, and performing a second wet-etch process using the mask pattern.

Description

technical field [0001] The present invention relates to liquid crystal display (LCD) devices, and more particularly, to methods for forming molybdenum Mo / aluminum Al bilayer metal lines for LCD devices. Background technique [0002] Overall, demand for displays of all kinds has been growing steadily. Accordingly, efforts have been made to research and develop various flat panel displays, such as liquid crystal displays (LCDs), plasma display panels (PDPs), electroluminescent displays (ELDs), and vacuum fluorescent displays (VFDs). Various types of flat panel displays are currently in use. [0003] Among various flat panel displays, liquid crystal display (LCD) devices have been most widely used because of excellent characteristics such as thinness, light weight, and low power consumption. Accordingly, LCD devices have gradually replaced cathode ray tubes (CRTs). In addition to portable LCD devices such as displays for notebook computers, LCD devices are also being develop...

Claims

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Application Information

Patent Timeline
10 Mar 2004
Publication
CN1480779A
IPC
G02F1/13; C03C17/40; C23F1/02; G02F1/1362
CPC
C03C2218/33; G02F1/136286; C03C17/40; C23F1/02; G02F2001/13629; G02F1/13629; G02F1/13
Inventors
李亨衞; ιƒ‘η‚³ε’Œ