Actuator and method of making the same
A manufacturing method and actuator technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric devices/electrostrictive devices, instruments, etc. Positioning accuracy and other issues
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no. 1 example
[0026] FIG. 1 is a schematic perspective view of an actuator according to a first embodiment of the present invention. As shown in FIG. 1, an actuator 10 of a first embodiment of the present invention is used for HDD servo control, moving a head slider SL (hereinafter referred to as a slider). The slider includes a magnetic head H for reading magnetically recorded information from and recording magnetic information to the hard disk. The slider SL is basically in the shape of a rectangular hexahedron, and its upper surface in FIG. 1 is an air bearing surface facing the hard disk. FIG. 1 schematically illustrates the slider SL, while omitting the slide rails and the like used to adjust the floating distance from the hard disk.
[0027] The actuator 10 comprises a glass substrate 12 (insulating substrate) as a rectangular plate; a pair of silicon arms 14, 14 each in the shape of a rectangular column; respective arm drivers 16 and thin film electrodes connected to the silicon arm...
no. 2 example
[0054] Although the arm actuator 16 having only a single piezoelectric film is described in the above-described first embodiment of the present invention, the arm actuator 16 may have a laminated structure in which piezoelectric films and internal electrode films are alternately stacked. Such an arm actuator with a laminated structure can be produced by various processes using known thin-film lamination techniques. now refer to Figures 5A-5F , to describe in detail the process of fabricating an arm driver with a stacked structure. Figures 5A-5F It is a schematic diagram for forming another embodiment process.
[0055] First, fabricate the arm drive 16 as described above (see Figures 4A-4E ) process, a rectangular piezoelectric film pattern 49A made of PZT is formed on one side 42b of a silicon substrate 42 doped with impurities (see Figure 5A ). In the upper surface area of the piezoelectric thin film pattern 49A, one end not including the end portion 49a is mutually...
no. 3 example
[0059] Although the above-mentioned first and second embodiments have described the actuator having the arm actuator 16 manufactured by the lamination technique, the actuator can also be manufactured with a separately prepared arm actuator. That is, if Figure 6As shown, a piezoelectric device 76 formed in a rectangular columnar shape can be used as an arm driver. In the piezoelectric device 76, a piezoelectric disk (piezoelectric part) 76A made of a piezoelectric material is sandwiched between a pair of electrode disks 76B, The sides of the 76C. Figure 6 is a schematic diagram of the actuator using piezoelectric device mode.
[0060] The process of manufacturing this actuator 10A will now be described. First, only the structure 78 consisting of the silicon arms 14, the glass substrate 12, and the thin-film electrodes 18 are fabricated in substantially the same process of fabricating the actuator 10 as in the first embodiment described above. Then, the piezoelectric device...
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