Parallel vibration pattern minitype electric field sensor

An electric field sensor and sensor technology, applied in the field of sensors, can solve the problems of high cost, limited detection range, and large volume

Inactive Publication Date: 2004-09-01
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
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Problems solved by technology

The earliest charge-inductive electric field sensors mainly include rotary vane structure and double-sphere structure. The advantages are simple structure and mature production technology; the disadvantages are large volume and high cost.
The advantages of optical electric field sensors are fast response and low noise, but the disadvantages are high cost and detection range generally limited to strong electric fields

Method used

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  • Parallel vibration pattern minitype electric field sensor
  • Parallel vibration pattern minitype electric field sensor
  • Parallel vibration pattern minitype electric field sensor

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Embodiment Construction

[0012] The structure of the parallel vibrating miniature electric field sensor is as follows: figure 1 As shown, it consists of two parts: excitation and induction. The sensing part is composed of the shielding electrode 3 and the sensing electrode 4 with a grid hole 5. The excitation part 1 generates a driving force, so that the shielding electrode 3 is parallel to the sensing electrode 4 to generate periodic relative motion, that is, the vibration direction is the x direction in Figure 2 (The vibration direction of the sensor described in the invention patent 02147377.3 is the z direction). The vibrating part can be the shielding electrode or the sensing electrode.

[0013] The shielding electrode 3 may be made of conductive material, or other materials coated with a conductive film, and has grid holes 5 on it. The shape of the grid hole 5 is rectangular, square, circular or other shapes, which are periodically distributed along the vibration direction; there may be multip...

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Abstract

The invention is a parallel vibrating micro electric field sensor, including: a vibration exciting part and a sensing part; the sensing part is composed of a screened electrode and a sensing electrode; there is a grating hole on the screened electrode. Under the action of vibration exciting driving force, the two electrodes move, relatively, horizontally and periodically. Compare with erect vibrating electric field, it has small air damping when vibrating and flexible vibration exciting driving mode, beneficial to reducing the electric interference between the vibration exciting signal and sensing signal.

Description

technical field [0001] The invention relates to a sensor, in particular to a parallel vibration miniature electric field sensor. Background technique [0002] Electric field sensors are widely used in many fields such as lightning prediction and environmental monitoring. According to its working principle, it can be divided into charge induction type and optical type. The earliest charge-inductive electric field sensors mainly include rotary vane structure and double-sphere structure. The advantages are simple structure and relatively mature manufacturing technology; the disadvantages are large volume and high cost. The advantages of optical electric field sensors are fast response and low noise, but the disadvantages are high cost and detection range generally limited to strong electric fields. [0003] The inventor recently proposed a vertical vibration electric field sensor based on microfabrication technology (invention patent application number 02147377.3). The sensor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/12G01R29/12
Inventor 夏善红白强
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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