Multifunction tridimension displacement laser interference measuring system
A technology of laser interferometry and measurement system, applied in the field of three-dimensional displacement laser interferometry system, can solve the problems of simultaneous measurement, moiré interferometry and electronic speckle interferometry, etc., and achieve the effect of compact structure and convenient use
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[0022] like figure 1 As shown, the multifunctional three-dimensional displacement laser interferometry system of the present invention is mainly composed of a laser 1, a light splitting coupler 2 that can control light splitting to form three displacement fields, a three-dimensional interference optical path system 3, an image acquisition camera system 4, and a six-dimensional The adjustment load frame consists of 5 components, all of which are installed on a worktable. The three-dimensional interferometric optical system 3 is integrated in the dark box and fixed on the workbench through three lifting supports to make the system miniaturized. The laser 1 and the optical coupler 2 are fixed on the workbench by fastening screws, and are located on the same side of the three-dimensional interference optical system 3 . The six-dimensional adjustment load frame 5 and the image acquisition camera system 4 are respectively installed on the front and rear sides of the three-dimension...
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