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Intermediate substrate, and structure having semiconductor element, intermediate substrate and substrate

A technology of semiconductors and structures, applied in the direction of semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc.

Inactive Publication Date: 2005-02-02
NGK SPARK PLUG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, there is no structure in which the intermediate substrate is interposed between the IC chip and the IC chip mounting substrate.

Method used

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  • Intermediate substrate, and structure having semiconductor element, intermediate substrate and substrate
  • Intermediate substrate, and structure having semiconductor element, intermediate substrate and substrate
  • Intermediate substrate, and structure having semiconductor element, intermediate substrate and substrate

Examples

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Embodiment Construction

[0112] now refer to figure 1 An embodiment of the present invention is described in detail. figure 1 is a top view showing the interposer (or intermediate substrate) 21A; figure 2 is along figure 1 X-X line cut section view of ; and image 3 is a schematic sectional view showing a state where solder bumps 26 and 27 are formed on first and second face terminals 28 and 29 . Figure 4 is the semiconductor of the present embodiment as an IC package substrate, which is composed of an IC chip (or semiconductor element) 15, an interposer (or intermediate substrate) 21, and a wiring substrate (also referred to as "substrate") 41. A schematic cross-sectional view of a packaging structure (also referred to as a "structure"). Figure 5 is a schematic sectional view showing the insert 21 , and FIG. 6 is a partially enlarged plan view showing the insert 21 . FIG. 7 is a schematic sectional view showing an interposer with an IC chip (or an intermediate substrate with a semiconductor...

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PUM

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Abstract

An intermediate substrate comprising: an intermediate substrate body containing an insulating material, and having a first face to be mounted with an semiconductor element and a second face opposing to said first face; and a semiconductor element mounting area including a plurality of first face terminals arranged on said first face, and being surrounded by an outermost periphery of said plurality of first face terminals, wherein a center of said semiconductor element mounting area is eccentric with respect to a center of said first face.

Description

technical field [0001] The present invention relates to an intermediate substrate, an intermediate substrate having a semiconductor element, a substrate having the intermediate substrate, and a structure having the semiconductor element, the intermediate substrate, and the substrate. Background technique [0002] Various structures have appeared in recent years (for example, see JP-A-2000-208661 ( figure 2 (d)) etc.) in which a wiring substrate on which an IC chip is mounted (such as an IC chip mounting substrate or an IC package substrate) and a printed circuit substrate such as a mother board are connected not directly but through a so-called "interposer" The intermediate substrate to connect to each other. [0003] Furthermore, an IC chip to be used in this type of structure is generally formed of a semiconductor material (such as silicon) having a coefficient of thermal expansion of about 2.0 ppm / °C to 5.0 ppm / °C. On the other hand, an intermediate substrate and a wiri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/56H01L23/12H01L23/48H01L23/498H05K1/18H05K3/30H05K7/06H05K7/10
CPCH01L2924/01046H05K7/1061H01L23/49827H01L2924/15174H01L2924/01079H01L21/563H05K2201/10734H01L2224/16H01L2924/09701H01L2924/15173H01L2924/15311H01L2924/01078H05K2201/10977H05K3/305H01L2224/05568H01L2224/05573H01L2224/06131H01L2224/16225H01L2224/32225H01L2224/73204H01L2924/00014Y02P70/50H01L2924/00H01L2224/05599
Inventor 齐木一浦岛和浩
Owner NGK SPARK PLUG CO LTD
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