Intermediate substrate, and structure having semiconductor element, intermediate substrate and substrate
A technology of semiconductors and structures, applied in the direction of semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc.
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[0112] now refer to figure 1 An embodiment of the present invention is described in detail. figure 1 is a top view showing the interposer (or intermediate substrate) 21A; figure 2 is along figure 1 X-X line cut section view of ; and image 3 is a schematic sectional view showing a state where solder bumps 26 and 27 are formed on first and second face terminals 28 and 29 . Figure 4 is the semiconductor of the present embodiment as an IC package substrate, which is composed of an IC chip (or semiconductor element) 15, an interposer (or intermediate substrate) 21, and a wiring substrate (also referred to as "substrate") 41. A schematic cross-sectional view of a packaging structure (also referred to as a "structure"). Figure 5 is a schematic sectional view showing the insert 21 , and FIG. 6 is a partially enlarged plan view showing the insert 21 . FIG. 7 is a schematic sectional view showing an interposer with an IC chip (or an intermediate substrate with a semiconductor...
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