Single mass plate triaxial micro-mechanical accelerometer

Abstract

The invention discloses a simple mass flat triaxiality tiny machine accelerometer, the mass flat is supported on the fundus by four groups of inner girder and four groups of outer girder, and four groups of comb is protruded on four directions, which cross to four groups of terminal comb on the fundusby to produce four couples of comb capacitor---capacitor C40a, capacitor C40b, capacitor C42a, and capacitor C42b, capacitor C42b and the capacitor C42b is equal to capacitor Cx which is along X direction, the capacitor C40a and the capacitor C40b are equal to capacitor Cy which is along to direction Y, its character is: it also includes a junior board which is under the mass flat, and composes a clinograph capacitor Cz with the mass flat, and the Cz, the Cx and the Cy compose the triaxiality accelerometer. The four groups of comb on the mass flat and the four groups of comb on the funduusby and the junior board are machining on one chip. The excellence of the invention is a mass flat can get linear acceleration on three directions X, Y, Z, and its size is tiny, its weight is light.

Description

technical field [0001] The invention provides a single-mass flat-plate three-axis micro-mechanical accelerometer, which belongs to the technical field of micro-inertial devices. Background technique [0002] refer to Figure 5 . Said Emre Alper of the Middle East Technical University in Turkey proposed a symmetrical structure for measuring the angular velocity input around the Z-axis direction, that is, the direction perpendicular to the mass plate at the Transducer 2001 conference. In this structure, the inertial mass slab is supported by four sets of inner beams and four sets of outer beams. Four groups of comb teeth protrude from the surroundings of the mass plate, which respectively intersect with comb teeth protruding from the four surrounding fixed electrodes to form four pairs of comb tooth capacitors. Its working principle is: the mass plate is subjected to electrostatic force in the XY plane, that is, the plane where the mass plate is located, and performs simple ...

AI Technical Summary

Problems solved by technology

But the structure is not sensitive to the linear acceleration in the Z direction

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