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Micro pressure sensor and preparing method thereof

A pressure sensor and pressure technology, applied in the field of sensing, can solve the problems of increasing the complexity of the sensing system, no product development and application, difficult to improve the measurement accuracy, etc., to achieve high resolution, short response time, and miniaturized devices. Effect

Inactive Publication Date: 2005-06-29
WUHAN UNIV OF TECH
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  • Description
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Problems solved by technology

However, the current LPFG signal is unstable, and the LPFG transmission line bandwidth is relatively wide, so it is difficult to improve the measurement accuracy
In addition, the birefringence effect is used to make the sensor, the complexity of the entire sensing system is increased, and the cost of the device is also greatly increased.
At present, the research in this area is still in the stage of laboratory research, and there is no corresponding product development and application

Method used

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  • Micro pressure sensor and preparing method thereof
  • Micro pressure sensor and preparing method thereof
  • Micro pressure sensor and preparing method thereof

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Embodiment Construction

[0030] Such as figure 2 , 3 As shown, the elastic sheet 7, the flexible hinge 8 and the rigid sheet 9 form a deformation body, and the two ends of the fiber Bragg grating (FBG) 6 are closely pasted on the side of the rigid sheet 9, and the middle part is fixed together with the elastic sheet 7; the rigid sheet 9 The middle part of the shrapnel 7 is bent into an arc shape. When the protruding part of the shrapnel 7 is subjected to lateral pressure, the shrapnel 7 will be deformed and straightened. The movable end of the shrapnel 7 pushes to the center of the FBG6 sideways, so that it generates tension along the longitudinal direction, so that The transverse pressure of the optical fiber is effectively converted into a force perpendicular to the pressure direction. This force is applied to the FBG6 to cause longitudinal strain, which makes the reflection wavelength of the FBG6 move. By detecting the wavelength change, the pressure condition can be known. FBG6 can be arranged i...

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Abstract

It is a micro pressure sensor, which comprises fiber Brag grating and pressure deformation. Its process method is as following: according to the conditions to design the deformation size; to compute the flexible gemel and elastic design parameters; to process deformation; to fix the grating on the side of deformation. When the elastic plate of the invention suffers transverse force, the PEG generates vertical strain force with its two ends fixed on the rigid thin plate to convert the transverse force into vertical pressure direction. The force is exerted in the PBG to generate vertical strain force to cause the reflection wavelength change to make the transverse pressure and reflect wavelength react together to achieve the measurement.

Description

technical field [0001] The invention belongs to the field of sensing technology, in particular to a miniature pressure sensor which can be placed in a small-sized space to measure the lateral pressure acting on an optical fiber Bragg grating and a preparation method thereof. Background technique [0002] Pressure is an important physical parameter that characterizes the state of an object, and its measurement involves all aspects of industrial and agricultural production and economic construction. The pressure sensor is a sensor with a wide range of applications and a very large demand, and has a very wide and important application prospect. With the development of science and technology, people also put forward the requirements of high precision, fast response and long life for the measurement of pressure. [0003] Fiber Bragg grating sensor is a new type of sensor developed in the past ten years. Due to its unique advantages, it has attracted extensive attention and devel...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/24
CPCG02B6/02328
Inventor 姜德生何伟王昌
Owner WUHAN UNIV OF TECH
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