Droplet discharging device, apparatus for manufacturing microarray, and method for manufacturing microarray
一种微型阵列、液滴的技术,应用在喷射装置、喷射装置、照相制版工艺曝光装置等方向
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[0027] Embodiments of the present invention will be described below with reference to the drawings.
[0028] Figure 4 It is a figure explaining the microarray manufacturing apparatus of this embodiment.
[0029] The microarray manufacturing device 500 of the present embodiment is a device for manufacturing a microarray formed by arranging many dots on the substrate 10 for making a microarray. The ejection device 100, the X-direction drive shaft 530, and the control computer 600 as a drive unit 540 and a control device are configured. In addition, position control is performed by the table 510, the Y direction drive shaft 520, the X direction drive shaft 530, the drive part 540, and the control computer 600 (position control means).
[0030] The mesa 510 is a table on which the microarray substrate 10 is placed. The stage 510 is configured to place several substrates 10 , and to fix each substrate 10 by, for example, vacuum suction.
[0031] The Y-direction drive shaft 520...
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