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Substrate carrier having door latching and substrate clamping mechanisms

A substrate carrier and substrate technology, applied in the direction of conveyor objects, transportation and packaging, electrical components, etc., can solve the problems of increasing the cost and complexity of the substrate carrier, to reduce the possibility of pollution or damage, The effect of preventing accidental contact

Inactive Publication Date: 2012-07-18
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The latching and clamping structures described above typically require many actuators and the use of specially designed keys, which add to the cost and complexity of the substrate holder

Method used

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  • Substrate carrier having door latching and substrate clamping mechanisms
  • Substrate carrier having door latching and substrate clamping mechanisms
  • Substrate carrier having door latching and substrate clamping mechanisms

Examples

Experimental program
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Effect test

Embodiment Construction

[0050] According to the invention, the door locking mechanism of the substrate carrier is automatically unlocked by the interaction of the locking mechanism with a drive mechanism located in the substrate transport unit (the substrate transport unit is for example For example, the substrate transport unit of the processing tool that may be used in the semiconductor device manufacturing process). The same drive mechanism can also release a substrate clamping mechanism that can be part of a substrate carrier (for example, a substrate clamp that secures a substrate stored by a substrate carrier during transport). tight mechanism).

[0051] figure 1 Is a schematic side elevational view showing a process tool and an associated factory interface, including a substrate transport unit arranged according to the invention. exist figure 1 In , reference numeral 100 denotes a schematic label of a processing tool.

[0052] As is well known to those skilled in the art, the processing ...

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PUM

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Abstract

On one hand, the present invention provides an automatic door opener, which comprises a platform (1), a door-opening mechanism (2) and a pipeline (3), wherein, the platform is used to support an underlayer bracket, and the door-opening mechanism is used to open the door of the underlayer bracket when the underlayer bracket is supported by the platform. The pipeline is extended from an opening on a clean room wall to the flatform and at least partially circles the platform. The pipeline is further used to guide the airflow coming form the clean room wall to the platform and out of the pipeline. The automatic door opener provides many other aspects.

Description

[0001] This application claims priority to US Provisional Application No. 60 / 407340, filed August 31, 2002, the entire contents of which are hereby incorporated by reference. technical field [0002] The present invention relates generally to substrate processing, and more particularly to substrate carriers and apparatus and methods for coupling them to processing tools. [0003] Related application reference [0004] This application is related to the following co-pending U.S. patent applications of the same assignee, each of which is hereby incorporated by reference in its entirety: [0005] U.S. Provisional Patent Application No. 60 / 407451, filed August 31, 2002, entitled "System For Transporting Wafer Carriers" (Attorney No. 6900 / L); [0006] U.S. Provisional Patent Application No. 60 / 407339, filed August 31, 2002, entitled "Method and Apparatus for Using Wafer Carrier Movement to Actuate Wafer Carrier Door Opening / Closing" (Attorney No. 6976 / L); [0007] U.S. Provisiona...

Claims

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Application Information

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IPC IPC(8): H01L21/00H01L21/677
CPCH01L21/67775H01L21/67017H01L21/67769H01L21/02
Inventor M·赖斯M·R·埃里奥特R·B·劳伦斯J·C·哈得根斯E·A·英格哈特
Owner APPLIED MATERIALS INC