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Data processing device with function of protecting equipment data

A technology for protecting equipment and processing devices, applied in the direction of electrical digital data processing, secure communication devices, computer security devices, etc., can solve problems such as theft and use, lack of protection, etc., and achieve the effect of data protection

Inactive Publication Date: 2006-03-08
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, these precious assets lack proper protection and can be stolen and used

Method used

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  • Data processing device with function of protecting equipment data
  • Data processing device with function of protecting equipment data
  • Data processing device with function of protecting equipment data

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Embodiment Construction

[0030] In order to make the purpose, features and advantages of the present invention more obvious and easy to understand, the preferred embodiments are specially cited below, together with the attached drawings figure 2 , Figure 3A and Figure 3B , give a detailed explanation. The description of the present invention provides different examples to illustrate the technical features of different implementations of the present invention. Wherein, the configuration of each element in the embodiment is for illustration, not for limiting the present invention. In addition, part of the symbols in the figures in the embodiments are repeated for the purpose of simplifying the description, and do not imply the relationship between different embodiments.

[0031] figure 2A schematic diagram of a manufacturing system according to an embodiment of the invention is shown. The manufacturing system 20 includes a processing device 21 and a host control system 25 . The processing devi...

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PUM

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Abstract

Processing equipment for protecting equipment data. A processing unit processes an article, such as a wafer. A storage unit stores equipment data for the processing unit. A controlling unit receives a data retrieval request for the equipment data, wherein the data retrieval request comprises identification data. An authentication unit validates the identification data and retrieves corresponding equipment data form the storage unit through the controlling unit, when the identification data is validated. An encryption unit receives the equipment data from the authentication unit, and encrypts the equipment data. A controlling unit further transfers the encrypted equipment data to an external system.

Description

technical field [0001] The present invention relates to data protection, in particular to a processing device and method capable of protecting device data. Background technique [0002] One or more wafers are usually combined into a "batch" to pass through a series of manufacturing tools and finally become integrated circuits. Each fabrication tool typically performs a single wafer fabrication operation on a given lot of wafers. For example, a particular fabrication tool may perform layering, patterning, doping, or thermal treatment. Thin film operations typically add a metal layer to the wafer surface. Patterning operations typically remove specific portions of the film formed by one or more thin film operations. Doping operations usually directly dope impurities into silicon through the wafer surface to create p-n junctions. A heating operation typically heats the wafer to a certain target level. [0003] Each fabrication tool typically executes wafer fabrication oper...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F21/00G06Q10/00
CPCG06F21/70G06F2221/0737H04L9/3271G06F21/16
Inventor 黄建中黄怡霖郭文章林炳宏李月青杨惠雯
Owner TAIWAN SEMICON MFG CO LTD