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Pecvd susceptor support construction

A technology for supporting equipment and equipment, applied in gaseous chemical plating, electrical components, coatings, etc., can solve problems such as reducing base deformation

Inactive Publication Date: 2006-03-22
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The present invention provides a solution to the problems encountered with the use of large ceramic blocks to support large area susceptors in place of currently used support assemblies that use multiple small support plates positioned to maintain the desired cross-sectional horizontal profile, and reduces the transfer to Pedestal deformation for correspondingly large-area substrates

Method used

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  • Pecvd susceptor support construction
  • Pecvd susceptor support construction
  • Pecvd susceptor support construction

Examples

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Embodiment Construction

[0074] The present invention provides apparatus and methods for supporting large area substrates that minimize thermal and gravitational bending or deflection and provide a sufficiently flat surface to support a susceptor or substrate support so that it can be positioned in a relatively flat or horizontal orientation. Support the substrate. Multiple isolated lift points are also provided in various aspects for counteracting substrate support deformation or terminal depression, or for manipulating the susceptor via these lift points to form a desired horizontal profile in the susceptor. Referring to the horizontal profile and / or horizontal orientation of various components shown in the figures, said figure represents a horizontal cross-sectional view of a particular component of the drawing.

[0075] The embodiments described herein replace the base support plate assembly 12 shown in FIGS. 1A and 1B with a support assembly having a smaller ceramic support plate to support the b...

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PUM

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Abstract

An apparatus and method for maintaining or adjusting the orientation of a large area substrate is disclosed by using multiple support plates disposed below a susceptor adapted to support the large area substrate. The multiple support plates are supported by a plurality of support shafts that are coupled to at least one actuator. The apparatus is designed to selectively adjust the horizontal cross-sectional profile of the susceptor to promote even and uniform processing. The horizontal profile may be one of planar, concave, or convex. The apparatus allows any adjustment to be made before, during, or after processing.

Description

technical field [0001] The invention relates to a substrate manufacturing system used in the electronics industry, in particular to an equipment and method for supporting large-size substrates in the manufacture of flat panel displays. Background technique [0002] Flat panel displays are typically panel screens used in various devices, such as television screens and computer screens, using an active matrix of electronic devices such as insulators, conductors, and thin film transistors (TFT's). Generally, these flat panel displays are fabricated on large area substrates, which may consist of two thin plates of glass, polymer material, or other suitable material on which electronic components are formed. The liquid crystal material or metal contact point matrix layer, the semiconductor active layer and the dielectric layer are deposited and sandwiched between the two thin plates through a series of steps. At least one of these panels includes a conductive film that will be c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/54
CPCH01L21/68742H01L21/68778H01L21/68792C23C16/4586H01L21/68
Inventor 栗田真一恩斯特·凯勒约翰·M·怀特
Owner APPLIED MATERIALS INC