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Heating crucible and deposition apparatus including the same

A technology for deposition devices and crucibles, which is applied in lighting devices, ion implantation plating, coatings, etc., can solve the problem that the heating crucible does not have the repeatability of deposition rate, etc.

Active Publication Date: 2006-05-10
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Heated crucibles made of ceramics do not have uniform deposition rates and good repeatability

Method used

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  • Heating crucible and deposition apparatus including the same
  • Heating crucible and deposition apparatus including the same
  • Heating crucible and deposition apparatus including the same

Examples

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Embodiment Construction

[0022] The heating crucible of the deposition device includes: a titanium body having an inner cavity and an opening, the inner cavity is used to accommodate the material to be deposited, and the opening is used to spray the material to be deposited; a wire is used to heat the main body; an insulator is used to Insulate the body from the wires. The invention also relates to a deposition device using the heated crucible in a deposition process.

[0023] Heating the crucible and deposition apparatus allows organic or metallic films to be deposited at a uniform deposition rate and with a high repetition rate of deposition. In addition, the organic film or metal film is deposited at a uniform deposition rate and excellent reproducibility, thereby enabling the display device to reproduce a uniform image across the entire screen.

[0024] The present invention is described more fully hereinafter with reference to the accompanying drawings that illustrate embodiments of the inventio...

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Abstract

The invention provides a heating crucible and a deposition device. The heating crucible has uniform deposition rate and excellent repeatability. The heating crucible of the deposition device includes: a titanium body with an inner cavity and an opening, the inner cavity is used to accommodate the material to be deposited, and the opening is used to spray the material to be deposited; a wire is used to heat the main body; an insulator is used to Insulate the body from the wires.

Description

technical field [0001] The invention relates to a heating melting tank, which has a uniform deposition rate and a high deposition repetition rate. The invention also relates to a deposition device using the heated crucible in a deposition process. Background technique [0002] The electroluminescent display device is expected to be a next-generation emissive display device because of its wide viewing angle, high contrast ratio, and fast response speed. [0003] Electroluminescent display devices are classified into organic light emitting display devices or inorganic light emitting display devices according to a material forming an emission layer (EML) in the electroluminescent display device. Compared with inorganic light emitting display devices, organic light emitting display devices are brighter and have higher driving voltage and faster response speed. Organic light emitting display devices can also display color images. [0004] An organic l...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/26C23C14/12
CPCC23C14/12C23C14/243H05B33/10
Inventor 柳承润柳景泰马成乐
Owner SAMSUNG DISPLAY CO LTD
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