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Photoelectric encoder, scale therefor and method for manufacturing the same

一种光电编码器、制造方法的技术，应用在仪器、转换传感器输出、采用光学装置传递传感构件等方向，能够解决缺乏信号强度等问题，达到提高信号强度、提高S/N、加工精确度高的效果

Active Publication Date: 2006-06-14
MITUTOYO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Thus, if the scale constitutes a light-absorbing region, the S / N is reduced due to the lack of signal strength

Method used

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  • Photoelectric encoder, scale therefor and method for manufacturing the same
  • Photoelectric encoder, scale therefor and method for manufacturing the same
  • Photoelectric encoder, scale therefor and method for manufacturing the same

Examples

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Embodiment Construction

[0021] An embodiment of the present invention will now be described in detail with reference to the accompanying drawings.

[0022] figure 1 is a perspective view showing a schematic structure of a photoelectric encoder according to an embodiment of the present invention. The photoelectric encoder 1 includes a main scale 10 , an index scale 20 , a light source 30 and a light receiving area 40 .

[0023] The main scale 10 extends along the measuring axis. The index scale 20 is arranged to move relative to the main scale 10 . The light source 30 projects light onto the main scale 10 through the index scale 20 . The light receiving area 40 receives light emitted from the light source 30 and reflected from the main scale 10 through the index scale 20 . The main scale 10 and the index scale 20 respectively have a protrusive strip 12 and marks 22 serving as graduations formed with a predetermined pitch. The position of the index scale 20 relative to the main scale 10 is detecte...

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Abstract

The main scale (10) has a convex grating (12), for example a chrome film, formed on a base element (11). The base member (11) and the chrome thin film constitute a reflective surface, which is set to provide a sufficient amount of received light on the light receiving surface. The convex grating (12) can be precisely shaped by photoetching the film.

Description

technical field [0001] The present invention relates to a photoelectric encoder for detecting position, angle, velocity, angular velocity, etc., a scale for the photoelectric encoder, and a method for manufacturing the scale. Background technique [0002] Generally, a photoelectric encoder includes a main scale, an index scale, a light source and a light receiving area. The main ruler extends along a measuring axis. The index scale is arranged to move relative to the main scale. The light source projects light onto the main scale through the index scale. The light receiving area receives light emitted from the light source and reflected from the main scale through the index scale. The main scale and the index scale respectively have scales formed at predetermined intervals. The position of the index scale relative to the main scale is detected by optically detecting the change in the phase of the scale formed on the two scales due to the relative movement therebetween. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/26
CPCG01D5/34707
Inventor 久保哲彦野泽至成
Owner MITUTOYO CORP
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