Piezoelectric valve based on piezoelectric stack driver

Abstract

The invention relates to a piezoelectric gas valve used in piezoelectric pile driver. Wherein, the valve is connected to one side of flexible baffle plate via hinge, and the lower end of another side has a force adjustable bolt while the upper end has a sealing disc and connecting the gas outlet; the valve has a gas inlet; the flexible support outside the valve contacts one end of piezoelectric pile driver while another end contacts the adjustable bolt; the upper end of one side of flexible baffle plate contacts one end of drive rod that inserting the valve and be sealed via the sealing cushion; the another end of drive rod that extending outside the valve contacts one end of piezoelectric pile driver. The invention uses piezoelectric pile driver with displacement amplifying function, and the baffle plate with flexible hinge as the baffle plate of nozzle baffle piezoelectric gas valve, with the advantages of straight motion and bended piezoelectric gas valve to confirm enough drive force and output displacement and avoid the gap error and response delay caused by the common lever amplifying device. The invention can be used in middle high pressure area with large flux, quick response and high drive force.

Description

technical field [0001] The invention relates to a piezoelectric valve based on a piezoelectric stack driver. Background technique [0002] Piezoelectric ceramic driver is a new type of micro-displacement driving device developed in recent years. It has the advantages of compact structure, small size, high resolution, fast response, and easy control. However, whether it is a direct-acting type, a bending type, or a torsional piezoelectric valve, there are defects that are difficult to overcome. The direct-acting piezoelectric valve has two problems. One is the problem of its small flow rate: due to the limitation of the expansion and contraction length of the piezoelectric stack (generally not exceeding 30um, otherwise the number of superimposed layers of the piezoelectric stack will be large, which directly leads to piezoelectric The increase of the capacitive load, and then the response frequency is greatly reduced), and the compensation of the elastic deformation of each ...

AI Technical Summary

Problems solved by technology

The direct-acting piezoelectric valve has two problems. One is the problem of its small flow rate: due to the limitation of the expansion and contraction length of the piezoelectric stack (generally not exceeding 30um, otherwise the number of superimposed layers of the piezoelectric stack will be large, which directly leads to piezoelectric The increase of the capacitive load, and then the response frequency is greatly reduced), and the compensation of the elastic deformation of each part of the elastic piezoelectric valve must also be considered. The flow rate of the direct-acting piezoelectric valve is generally relatively small, which is difficult to meet the actual control requirements

The second is the problem of processing and debugging: the direct-acting piezoelectric valve generally uses the sealing method of the cone valve, which requires very high machining accu

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