Carrying apparatus and carrying control method for sheet-like substrate

Abstract

The invention relates to a transfer device for transferring thin plate-like articles, such as liquid crystal display panels and glass substrates, into a processing device. The invention provides, in a transfer device provided with a relatively large robot (14) having a turning arm (16) for transferring large-sized thin plate-like articles, a transfer device capable of stabilized lifting even if the height is 2 m or so and capable of transfer in which the amount of deflection with the turning arm (16) extended can be corrected; and a thin plate-like article transferring system. A transfer robot (14) having the turning arm (16) is mounted on a horizontal support block (13) cantilevered for lifting and lowering motion on two upright support bodies (12). Further, the amount of deflection with the arm extended is corrected by raising the level of the horizontal support block (13) according to the amount of deflection. The amount of deflection can also be corrected by changing the angle of installation at which the robot (14) is mounted on the horizontal support block (13).

Description

technical field [0001] The invention relates to a device set in a specified clean environment for transferring or transporting semiconductor wafers, liquid crystal display devices, plasma display devices, organic and inorganic electroluminescence display devices, field emission display devices, liquid crystal display panels, printing A conveying device and a conveying control method of a thin-plate-shaped substrate such as a raw material substrate such as a circuit board, an intermediate product, and a finished product. Background technique [0002] Conventionally, a SCARA type robot represented by Patent No. 2739413 is generally used as a robot for transferring thin plate substrates in a clean environment. However, in recent years, with the increase in size of displays such as liquid crystal displays (LCD TVs, etc.), the glass substrates used for them have increased in size, and the robots that transport them have also been required to increase in size. Therefore, in the p...

AI Technical Summary

Problems solved by technology

Large thin-plate-shaped substrates are heavy and easy to bend, so there is a problem that it is difficult to transport large-scale thin-plate-shaped substrates with a certain weight in the height direction at high speed and stably

If the holding position is shifted, not only the thin plate-shaped substrate cannot be placed in the correct position, but also the moving path and bending amount of the glass plate during transportation cannot be accurately confirmed. damaged by contact

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