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Manufacturing method and device of organic electroluminescent device

A technology of electroluminescent devices and manufacturing methods, applied in the direction of electroluminescent light sources, semiconductor/solid-state device manufacturing, electric solid-state devices, etc., to achieve the effect of preventing thermal expansion and accurate position alignment

Inactive Publication Date: 2006-09-20
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0006] The present invention is made in order to solve such problems of the prior art, and its object is to provide a kind of organic electroluminescent device manufacturing technique, and it does not have the problem that the substrate is polluted in the pretreatment process, and can accurately carry out substrate Align with the position of the mask to form a fine organic light-emitting layer

Method used

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  • Manufacturing method and device of organic electroluminescent device
  • Manufacturing method and device of organic electroluminescent device
  • Manufacturing method and device of organic electroluminescent device

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Embodiment Construction

[0022] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

[0023] figure 1 is a schematic configuration diagram of main parts showing the first embodiment of the organic electroluminescent device manufacturing apparatus of the present invention, figure 2 (a), figure 2 (b) is a schematic configuration diagram showing the processing flow of the preprocessing unit in this embodiment.

[0024] Such as figure 1 As shown, the organic electroluminescent device manufacturing apparatus 1 of the present embodiment has: a preprocessing part 2 for performing pretreatment on a substrate 10; an organic light emitting layer forming part (organic light emitting layer forming part) layer forming part) 3.

[0025] Each chamber described later of the preprocessing unit 2 and the organic light-emitting layer forming unit 3 is connected to an unillustrated vacuum exhaust system, and is configured to transfer the substrate ...

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Abstract

The invention relates to a method for producing organic electric illuminator, without the liner pollution in pretreatment process, while it can accurately position the liner and the mask to form organic illuminate layer. The invention comprises a pretreatment process on the liner (10), which comprises the processes of vacuum heating and cooling said liner (10); when the cooling process is over, positioning the mask (11) relative to the liner (10) to form a cavity transmission layer via said mask (11); then forming the organic illuminate layer with at least one color; said cooling process is after the heating process in bake room 923) and after the vacuum plasma process in the pretreatment room (25), while it is processed in the cooling room (24).

Description

technical field [0001] The present invention relates to a technique for manufacturing an organic electroluminescent (EL) element in a vacuum, and particularly relates to a technique for aligning a substrate as a film-forming object and a film-forming mask. Background technique [0002] Generally, when manufacturing an organic electroluminescent device, in order to prevent the reduction of the luminance of the organic electroluminescent device, pretreatments such as heating and cooling treatment and plasma treatment are performed on the substrate with a transparent electrode. [0003] However, conventionally, since the substrate is heated and cooled in the air, there is a problem that the substrate is contaminated when the substrate is placed in a vacuum. [0004] Moreover, in the prior art, since the substrate thermally expands during heat treatment and plasma treatment, it is difficult to accurately position the substrate and the mask, especially when forming a fine organic...

Claims

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Application Information

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IPC IPC(8): H01L51/56H05B33/10
CPCA01F25/16A23B9/08E04B1/7612
Inventor 羽根功二
Owner ULVAC INC
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