Six-freedom micro operation robot with complete position and posture feedback

A degree of freedom and micro-manipulation technology, applied to manipulators, manufacturing tools, program-controlled manipulators, etc., can solve problems not included in feedback, micro-manipulation robots with complex structures, and difficult calibration

Inactive Publication Date: 2006-10-18
YANSHAN UNIV
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AI Technical Summary

Problems solved by technology

In order to realize the closed-loop control of the position and posture of the micro-manipulation robot, it is necessary to detect the multi-dimensional micro-displacement (control result) of the end of the micro-manipulation robot, that is to say, this micro-manipulation robot must have a detection device for multi-dimensional micro-displacement, which makes this micro-manipulation The structure of the operating robot is complex and difficult to calibrate
At present, the multi-dimensional micro-manipulation robot mainly adopts a parallel structure, and most of its posture feedback signals come from the voltage of the strain gauge attached to the branch of the robot. Since the end (worktable) of the micro-manipulation robot is not included in the feedback loop, the current control system of the micro-manipulation robot pose is only a semi-closed-loop control system

Method used

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  • Six-freedom micro operation robot with complete position and posture feedback
  • Six-freedom micro operation robot with complete position and posture feedback

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Embodiment Construction

[0009] figure 1 It is an embodiment disclosed by the present invention. This six-degree-of-freedom micro-manipulation robot with full posture feedback is composed of a worktable 1, a feedback branch 2, a drive branch 3, and a base 4. The connection between the workbench 1 and the base 4 It is connected by 12 kinematic chain branches, among which, 6 kinematic chain branches are feedback branch 2, and feedback branch 2 is composed of feedback branch strut 6 and strain gauge 7 with flexible hinge 5 at both ends; the remaining 6 kinematic chain branches To drive the branch 3, the driving branch 3 is composed of a driving branch pillar 8 with flexible hinges 9 at both ends, a parallel plate elastic moving pair 10 and a piezoelectric ceramic micro-displacement device 11. The 12 kinematic chain branches are divided into 3 groups, 4 in each group, consisting of two feedback branches 2 and two drive branches 3 respectively. One end of the driving branch pillar 8 of the driving branch ...

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Abstract

The six-freedom micro operation robot with complete position a posture feedback features that the bench and the pedestal are connected through 12 kinematic link branches, including 6 feedback branches comprising a feedback branch pillar with flexible hinges on two ends and a strain gauge each, and 6 driving branches comprising a driving branch pillar with flexible hinges on two ends, parallel plate elastic shift pair and piezoelectric ceramic displacement unit each. The 12 kinematic link branches are separated into 3 groups including 2 feedback branches and 2 driving branches each. The main body of the six-freedom micro operation robot is one integral part machined through once machining. The present invention has simple structure, small size, low manufacture cost and other advantages, can realize micro complete closed-loop control with no friction, no interval and high resolution, and may be used widely.

Description

technical field [0001] This invention belongs to the field of microelectromechanical systems (MEMS). Background technique [0002] As an important branch of Micro Electro Mechanical System (MEMS) research field, micro-manipulation robot has been highly valued by scholars at home and abroad. The micro-manipulation robot moves finely and has positioning resolution from submicron to nanometer level. Broad application prospects. The advantages of the parallel mechanism, such as compact structure, short kinematic chain, high stiffness and large load capacity, make it suitable as a prototype of micro-manipulation robot mechanism. In 1992, my country listed "micro-manipulation robot" as a national "863" plan scientific and technological research project. Harbin Institute of Technology developed a six-degree-of-freedom parallel micro-manipulation robot, which is a variant Stewart platform with a six-branch PSS pair. The P pair is horizontally driven by piezoelectric ceramics, all...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J9/08
Inventor 金振林高峰陈贵林
Owner YANSHAN UNIV
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