Six-freedom micro operation robot with complete position and posture feedback

Abstract

The six-freedom micro operation robot with complete position a posture feedback features that the bench and the pedestal are connected through 12 kinematic link branches, including 6 feedback branches comprising a feedback branch pillar with flexible hinges on two ends and a strain gauge each, and 6 driving branches comprising a driving branch pillar with flexible hinges on two ends, parallel plate elastic shift pair and piezoelectric ceramic displacement unit each. The 12 kinematic link branches are separated into 3 groups including 2 feedback branches and 2 driving branches each. The main body of the six-freedom micro operation robot is one integral part machined through once machining. The present invention has simple structure, small size, low manufacture cost and other advantages, can realize micro complete closed-loop control with no friction, no interval and high resolution, and may be used widely.

Description

technical field [0001] This invention belongs to the field of microelectromechanical systems (MEMS). Background technique [0002] As an important branch of Micro Electro Mechanical System (MEMS) research field, micro-manipulation robot has been highly valued by scholars at home and abroad. The micro-manipulation robot moves finely and has positioning resolution from submicron to nanometer level. Broad application prospects. The advantages of the parallel mechanism, such as compact structure, short kinematic chain, high stiffness and large load capacity, make it suitable as a prototype of micro-manipulation robot mechanism. In 1992, my country listed "micro-manipulation robot" as a national "863" plan scientific and technological research project. Harbin Institute of Technology developed a six-degree-of-freedom parallel micro-manipulation robot, which is a variant Stewart platform with a six-branch PSS pair. The P pair is horizontally driven by piezoelectric ceramics, all...

AI Technical Summary

Problems solved by technology

In order to realize the closed-loop control of the position and posture of the micro-manipulation robot, it is necessary to detect the multi-dimensional micro-displacement (control result) of the end of the micro-manipulation robot, that is to say, this micro-manipulation robot must have a detection device for multi-dimensional micro-displacement, which makes this micro-manipulation The structure of the operating robot is complex and difficult to calibrate

At present, the multi-dimensional micro-manipulation robot mainly adopts a parallel structure, and most of its posture feedback signals come from the voltage of the strain gauge attached to the branch of the robot. Since the end (worktable) of the micro-manipulation robot is not included in the feedback loop, the current control system of the micro-manipulation robot pose is only a semi-closed-loop control system

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