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Electroless deposition methods and systems

A technology of electroless plating and substrate, applied in the direction of printed circuit, electrical components, printed circuit manufacturing, etc., can solve the problems of complexity, performance, cost, etc.

Inactive Publication Date: 2006-10-18
HEWLETT PACKARD DEV CO LP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Each of these methods has disadvantages that limit their effectiveness, such as expense, reliability, performance, and complexity

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0058] By dissolving 1-5 g / LSnCl in a solution of approximately 1 mL of concentrated HCl (~37%) per liter of solution 2 2H 2 O Prepare a first solution of electroless plating catalyst salt. This first solution is placed in the first inkjet print head. By dissolving 1 g / L PdCl in a solution of approximately 1 mL concentrated HCl (~37%) per liter of solution 2 A second solution of electroless plating catalyst salt is prepared. This second solution is placed in the second inkjet print head. Solvated metal compositions comprising the components shown in Table 1 were prepared.

[0059] components

[0060] The glass substrate was heated using a hot plate and kept at about 60 °C. The metal composition is then placed in a third inkjet printhead. A reducing agent composition of 0.0065 ± 0.0010 M hydrazine was also placed in the fourth inkjet print head. The first solution was printed in a simple circuit pattern on a glass substrate. After about 30 seconds, rinse the s...

Embodiment 2

[0062] First and second solutions of electroless catalyst salts were prepared as in Example 1 and placed in the printhead. Solvated metal compositions comprising the components shown in Table 2 were prepared.

[0063] components

[0064] The polyimide substrate was heated and maintained at about 70°C. The metal composition is then placed in a third piezoelectric inkjet printhead. A 0.05% aqueous hydrazine reducing agent composition was also placed in the fourth piezo inkjet print head. The first solution was printed in a simple circuit pattern on a polyimide substrate. After 1 minute, the substrate was rinsed with water, and a second solution was printed onto the same area. After about 30 seconds, the substrate was again rinsed with water and dried. A metal solution is then printed on the same pattern. The reducing agent solution was then immediately printed on the pattern and the substrate was allowed to rest for 1 minute. The substrate was then rinsed to form...

Embodiment 3

[0066] The electroless active layer is formed by physical vapor deposition of palladium on a silicon substrate. Solvated metal compositions comprising the components shown in Table 3 were prepared.

[0067] components

[0068] The silicon substrate is heated and maintained at about 45°C. The metal composition is then placed in the first thermal inkjet printhead. A reducing agent composition with 0.01 M hydrazine was also placed in the second thermal inkjet print head. The metal solution was printed on a circuit pattern with a trace width of about 1 mm. The reducing agent solution was then immediately printed on the pattern and the substrate was allowed to rest for 1 minute. The substrate was then rinsed to form silver metal traces 70nm deep.

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Abstract

Methods and systems for depositing metal patterns on substrates are provided. Accordingly, an electroless plating active layer can be formed on the substrate. The at least two components of the electroless deposition composition can then be independently inkjetted onto the various substrates using inkjet technology. The metal composition can be inkjet onto the electroless active layer. The metal composition may comprise a metal salt and optional additives. The reducing agent composition may be jetted before or after the metal composition to form the electroless composition on the substrate. The metal salt and reducing agent react to form a metal pattern that can be used in the formation of electronic devices or other products. The ink-jettable compositions are stable over a wide range of conditions and allow extensive freedom in ink-jet formulation and substrate selection.

Description

field of invention [0001] The present invention generally relates to printing metals using electroless plating methods. Background of the invention [0002] Computer printer technology has advanced to the point where very high resolution images can be transferred to various media. Inkjet printing involves depositing droplets of fluid ink onto a media surface in response to a digital signal. Common inkjet printing methods include thermal inkjet and piezoelectric inkjet technologies, but other inkjet methods are also known. Typically, fluid ink is placed or sprayed onto the surface without physical contact between the printing device and the surface. Inkjet printing has become a popular method of recording images on various media surfaces, especially paper, for several reasons. Some of these reasons include low press noise, capability for high-speed recording, and multi-color recording. In addition, consumers can obtain these advantages at a lower cos...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C18/16C23C18/28C23C18/40C23C18/44H05K3/18
CPCC23C18/1601C23C18/1603C23C18/1608C23C18/161C23C18/1658C23C18/1678C23C18/1879C23C18/28C23C18/30C23C18/31C23C18/405C23C18/44H05K3/182H05K2203/013H05K2203/1157A61P31/04
Inventor P·马迪洛维奇G·S·赫尔曼D·潘萨兰S·伯塔恩
Owner HEWLETT PACKARD DEV CO LP