Substrate positioning device, substrate positioning method and program

Abstract

The substrate alignment device of the present invention prevents a disturbance portion caused by abnormal data such as saturation data from being mistakenly determined as a notch mark formed on the periphery of a substrate and improves the determination accuracy of the notch mark. The peripheral edge of the wafer (W) placed on the rotary stage (210) is detected by a light-transmitting sensor (250), the detected value is obtained as substrate peripheral shape data, and sudden abnormality data is detected from the substrate peripheral shape data, The detected sudden abnormal data is deleted, and the interference reduction processing of the part is tweened based on the prediction data obtained from the peripheral data; the notch mark candidates are detected from the substrate peripheral shape data after the interference reduction processing, and the corresponding part of the notch mark candidates is determined. Data group curve approximation, whether the error between the obtained approximation curve and the data group of the notch mark candidate part satisfies the predetermined judgment condition;

Description

technical field [0001] The present invention relates to a substrate positioning device, a substrate positioning method, and a program for detecting notch marks formed on the periphery of a substrate such as a wafer, and positioning the substrate based on the detected notch marks. Background technique [0002] The substrate processing apparatus carries substrates such as wafers, such as substrates to be processed, used to manufacture semiconductor devices, into a processing chamber through a conveying member such as a conveying arm, and performs predetermined processes such as etching and film formation on the carried wafers. Especially in recent years, with the miniaturization of circuit patterns, high-level microfabrication technology has become indispensable. Therefore, in the case of performing the above-mentioned processing on the wafer or in the case of inspection, etc., the orientation of the wafer When positioning, position setting accuracy corresponding to the precis...

AI Technical Summary

Problems solved by technology

However, compared with an opaque wafer made of an opaque material such as silicon, a transparent wafer transmits light almost entirely, so the light transmission sensor cannot detect the peripheral edge of the wafer.

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