Perpendicular magnetic recording medium and magnetic recording/reproducing apparatus

Abstract

To make possible high density recording by making the structure of the perpendicular magnetic recording layer finer. A perpendicular magnetic recording medium 10 includes at least a nonmagnetic under layer 2, a perpendicular magnetic layer 3, and a protective layer which are stacked on a nonmagnetic substrate 1, wherein the perpendicular magnetic layer includes ferromagnetic crystal grains and nonmagnetic crystal grain boundary regions, wherein the crystal grain boundary region includes at least two kinds of oxide.

Description

technical field

[0001] The present invention relates to a magnetic recording medium used in a hard disk device or the like using a magnetic recording technique, and more particularly to a technique for a magnetic recording / reproducing medium using a magnetic recording / reproducing device.

[0002] This application claims priority from Japanese Patent Application No. 2003-333480 filed September 25, 2003, the contents of which are incorporated herein by reference. This application is filed under 35.U.S.C. 111(a) and claims priority under 35.U.S.C. 119(e) to provisional application 60 / 507,124 filed October 1, 2003 under 35.U.S.C. 111(b). Background technique

[0003] Magnetic recording media using a longitudinal magnetic recording system are known in the conventional art. On the other hand, the perpendicular magnetic recording system is gradually attracting attention as an alternative system to the longitudinal magnetic recording system in order to meet the requirement of incre...

Examples

example 1

[0087] A non-magnetic substrate was prepared, which was a glass substrate for a 2.5-inch magnetic disk.

[0088] Place the non-magnetic substrate in a vacuum of 1×10 -5 The sputtering was performed by direct current magnetron sputtering in argon gas at 0.6 Pa pressure in a vacuum chamber heated to 250 °C.

[0089] First, the non-magnetic substrate is set relative to the target, and electromagnetic radiation of 500 watts of direct current is radiated to the target to form a chromium layer with a thickness of 40 nanometers as a non-magnetic primer film. On this nonmagnetic undercoat film, a 25 nm thick CoCrPt ferromagnetic layer was formed as a bias application layer. A 200 nm thick CoZrNb soft magnetic layer was formed on the obtained CoCrPt ferromagnetic layer.

[0090] Thereafter, in a vacuum of 1×10 -5 Cool the substrate down to room temperature in a Pa vacuum chamber. A 10 nm-thick NiTa layer was formed on the CoZrNb soft magnetic layer as a nonmagnetic seed layer by us...

example 2

[0108]As the perpendicular magnetic recording layer of Example 2, a perpendicular magnetic recording medium was manufactured according to the same procedure as in Example 1, except that various oxides were used in the composite target, the target being Co-16at%Pt-10at% The composite target of Cr and CoPtCr-4mol% B (wherein A represents from Y 2 o 3 、WO 3 , MgO, Al 2 o 3 , ZrO 2 , HfO 2 At least one selected from, B stands for TiO 2 , CeO 2 , SiO 2 、Cr 2 o 3 , NiO, Ta 2 o 5 at least one selected from), which has oxide combinations of various elements shown in Table 1 below, instead of using CoPtCr-3mol%Y 2 o 3 -5mol% SiO 2 composite target.

[0109] In addition to the difference in the perpendicular recording layer, the obtained perpendicular magnetic recording medium has and Figure 5 The same layer structure is shown for the perpendicular magnetic recording medium.

[0110] The recording / reproducing characteristics of the obtained perpendicular magnetic recor...

example 3

[0114] As the perpendicular magnetic recording layer of Example 3, a perpendicular magnetic recording medium was manufactured according to the same method as Example 1, except that an oxide composite target having various composition ratios was used, and the target was CoPtCr-xmol%A -ymol% B composite target (where A represents from Y 2 o 3 and WO 3 At least one selected from, B stands for SiO 2 、Cr 2 o 3 and Ta 2 o 5 at least one selected from), which has various composition ratios shown in Table 2 below, instead of using CoPtCr-3mol%Y 2 o 3 -5mol% SiO 2 composite target.

[0115] In addition to the difference in the perpendicular recording layer, the obtained perpendicular magnetic recording medium has and Figure 5 The same layer structure is shown for the perpendicular magnetic recording medium.

[0116] The recording / reproduction characteristics of the obtained perpendicular magnetic recording medium of Example 3 were evaluated in a similar manner to Example 1....

technical field

[0001] The present invention relates to a magnetic recording medium used in a hard disk device or the like using a magnetic recording technique, and more particularly to a technique for a magnetic recording / reproducing medium using a magnetic recording / reproducing device.

[0002] This application claims priority from Japanese Patent Application No. 2003-333480 filed September 25, 2003, the contents of which are incorporated herein by reference. This application is filed under 35.U.S.C. 111(a) and claims priority under 35.U.S.C. 119(e) to provisional application 60 / 507,124 filed October 1, 2003 under 35.U.S.C. 111(b). Background technique

[0003] Magnetic recording media using a longitudinal magnetic recording system are known in the conventional art. On the other hand, the perpendicular magnetic recording system is gradually attracting attention as an alternative system to the longitudinal magnetic recording system in order to meet the requirement of incre...

Examples

example 1

[0087] A non-magnetic substrate was prepared, which was a glass substrate for a 2.5-inch magnetic disk.

[0088] Place the non-magnetic substrate in a vacuum of 1×10 -5 The sputtering was performed by direct current magnetron sputtering in argon gas at 0.6 Pa pressure in a vacuum chamber heated to 250 °C.

[0089] First, the non-magnetic substrate is set relative to the target, and electromagnetic radiation of 500 watts of direct current is radiated to the target to form a chromium layer with a thickness of 40 nanometers as a non-magnetic primer film. On this nonmagnetic undercoat film, a 25 nm thick CoCrPt ferromagnetic layer was formed as a bias application layer. A 200 nm thick CoZrNb soft magnetic layer was formed on the obtained CoCrPt ferromagnetic layer.

[0090] Thereafter, in a vacuum of 1×10 -5 Cool the substrate down to room temperature in a Pa vacuum chamber. A 10 nm-thick NiTa layer was formed on the CoZrNb soft magnetic layer as a nonmagnetic seed layer by us...

example 2

[0108]As the perpendicular magnetic recording layer of Example 2, a perpendicular magnetic recording medium was manufactured according to the same procedure as in Example 1, except that various oxides were used in the composite target, the target being Co-16at%Pt-10at% The composite target of Cr and CoPtCr-4mol% B (wherein A represents from Y 2 o 3 、WO 3 , MgO, Al 2 o 3 , ZrO 2 , HfO 2 At least one selected from, B stands for TiO 2 , CeO 2 , SiO 2 、Cr 2 o 3 , NiO, Ta 2 o 5 at least one selected from), which has oxide combinations of various elements shown in Table 1 below, instead of using CoPtCr-3mol%Y 2 o 3 -5mol% SiO 2 composite target.

[0109] In addition to the difference in the perpendicular recording layer, the obtained perpendicular magnetic recording medium has and Figure 5 The same layer structure is shown for the perpendicular magnetic recording medium.

[0110] The recording / reproducing characteristics of the obtained perpendicular magnetic recor...

example 3

[0114] As the perpendicular magnetic recording layer of Example 3, a perpendicular magnetic recording medium was manufactured according to the same method as Example 1, except that an oxide composite target having various composition ratios was used, and the target was CoPtCr-xmol%A -ymol% B composite target (where A represents from Y 2 o 3 and WO 3 At least one selected from, B stands for SiO 2 、Cr 2 o 3 and Ta 2 o 5 at least one selected from), which has various composition ratios shown in Table 2 below, instead of using CoPtCr-3mol%Y 2 o 3 -5mol% SiO 2 composite target.

[0115] In addition to the difference in the perpendicular recording layer, the obtained perpendicular magnetic recording medium has and Figure 5 The same layer structure is shown for the perpendicular magnetic recording medium.

[0116] The recording / reproduction characteristics of the obtained perpendicular magnetic recording medium of Example 3 were evaluated in a similar manner to Example 1....

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