Nanoparticle composite magnetic core film and preparation method thereof

Abstract

A nanoparticle composite magnetic core film comprises ferromagnetic metal and X'O composite particles and an XO amorphous particle layer wrapping the surfaces of the composite particles, and the composite particles and the amorphous particle layer form a core-shell structure. The absolute value of the oxide formation enthalpy of the ferromagnetic metal is less than the absolute value of the oxide formation enthalpy of X' which is less than the absolute value of the oxide formation enthalpy of X. In the composite magnetic core film, the volume percent of ferromagnetic metal is 60%-80%, the volume percent of X'O is 10%-30%, and the volume percent of XO is 10%-30%. According to the nanoparticle composite magnetic core film provided by the invention, firstly, a structure in which the surface of an MX' alloy is coated with an XO oxide layer is formed through magnetron sputtering, and the purpose of increasing the resistivity of the film is achieved with relatively low volume content; and secondly, annealing treatment is carried out in an oxidizing atmosphere, so that X' is oxidized, magnetic particles are separated out and refined, random anisotropy is introduced, and the coercive force of the film is effectively reduced.

Description

technical field [0001] The invention relates to a high-frequency nanocomposite magnetic core film suitable for magnetic devices such as thin film inductors and transformers and a preparation method thereof. Background technique [0002] The development of electronic information technology requires electronic devices to be more miniaturized and integrated. At the same time, in the process of miniaturization and thin filming of the components themselves, as the most important thin film inductors in micromagnetic devices, they can especially integrate with semiconductor devices. The thin film inductors integrated together have broad application prospects in the modern information field. With the development of electronic communication technology, especially the arrival of the 5G era, integrated magnetic devices based on thin film core materials are developing towards high frequency, which puts forward higher requirements for the high frequency performance of soft magnetic thin ...

AI Technical Summary

Problems solved by technology

However, in this type of film, although increasing the XO volume content can increase the film resistivity and reduce the coercive force, it will reduce the saturation magnetization and permeability; conversely, reducing the XO volume content can increase the saturation magnetization and permeability. rate, but at the expense of resistivity and coercivity

The above contradictions have long limited the development of high-frequency nanoparticle films.

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