Thin film transistor substrate and manufacturing method thereof

Abstract

A thin film transistor substrate with improved display quality is disclosed, comprising: gate lines; data lines crossing the gate lines and providing pixel regions adjacent to the gate lines and the data lines; data patterns formed on the lines connected to the data lines On substantially the same plane and formed of substantially the same material as the data line; a thin film transistor, connected to the gate line and the data line, and a pixel electrode, connected to the thin film transistor; an organic protective layer, formed under the pixel electrode and protecting the thin film transistor; and an inorganic protection layer formed between the data pattern and the organic protection layer, the inorganic protection layer being formed on the data pattern in a pattern similar to the data pattern. A method for manufacturing the above-mentioned thin film transistor is further provided.

Description

[0001] This application claims priority to Korean Patent Application No. 2005-59658 filed on Jul. 4, 2005 and the benefits arising therefrom under 35 U.S.C. §119, and the entire contents of this application are hereby incorporated by reference. technical field [0002] The present invention relates to a thin film transistor (TFT) substrate and a manufacturing method thereof, and more particularly, to a thin film transistor substrate with improved display quality and a manufacturing method thereof. Background technique [0003] Generally, thin film transistor substrates are used to independently drive individual pixels on a liquid crystal display (LCD) or an organic light emitting diode (OLED) or the like. [0004] The thin film transistor substrate includes: gate lines for transmitting gate signals, data lines for transmitting data signals, thin film transistors connected to the gate lines and data lines, and pixel electrodes connected to the thin film transistors. The gate ...

AI Technical Summary

Problems solved by technology

[0007] The metal oxide layer weakens the adhesion between the organic protective layer and the data pattern, causing the organic protective layer to loosen from the data pattern

In addition, the metal oxide layer reduces the adhesion between the photoresist and the data pattern, causing the data pattern to be disconnected

Moreover, the metal oxide layer short-circuits the data line and the source electrode, causing pixel defects

Furthermore, due to the metal oxide layer, it is impossible to form tiny data patterns, so it is difficult to realize the system-on-glass (SOG)

[0008] As described above, in a thin film transistor substrate having a structure in which the data pattern is directly exposed to various chemical substances or the data pattern is directly in contact with the organic protective layer, various corrosions and defects are generated. Using this thin film transistor substrate The display quality of the bottom display device will deteriorate

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