Preparation method and equipment of color carbon-base film

Abstract

This invention provides a preparation of composing multicolor thin film of carbon radical, among them use gas low molecular hydrocarbons as main carbon source, sputtering graphite as assistant carbon source, Density of gas hydrocarbon is 5% to 80%. Reaction temperature of coating is controlled at 50deg.C to 300deg.C,reaction time is controlled in 5min to 150min. This invention simultaneously provides a coating equipment of reactive magnetron sputtering that carries out above-mentioned method, gas alkanes is used as main carbon source, sputtering graphite is usedas assistant carbon source.

Description

technical field

[0001] The invention relates to a preparation method and equipment for a class of colored thin films, in particular to a vacuum coating method and equipment for colored carbon-based thin films. Background technique

[0002] With the continuous development of science and technology, vacuum coating technology has been widely used in many fields such as mechanical processing, construction, and daily necessities. Nowadays, people's requirements for coating are getting higher and higher, especially for color coating technology. Black, gray and brown as elegant and popular colors are gradually attracting the attention of the vacuum coating industry. Ordinary coating process usually adopts metallic elements such as manganese, chromium, nickel as coating material, as in Chinese patent CN89101722.4, just adopts the method for vacuum coating to coat ordinary glass into brown color, but the method of this vacuum coating adopts Multi-layer coating process, and each laye...

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