Capacitive physical quantity sensor and method of diagnosing the same

A physical quantity sensor, sensor technology, applied in the direction of capacitance measurement, conversion of sensor output, transmission of sensing components by electromagnetic/magnetic devices, etc.

Inactive Publication Date: 2007-06-06
DENSO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, when the PIN signal is set to Hi by external noise, such as electromagnetic noise, the output sig

Method used

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  • Capacitive physical quantity sensor and method of diagnosing the same
  • Capacitive physical quantity sensor and method of diagnosing the same
  • Capacitive physical quantity sensor and method of diagnosing the same

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no. 2 example

[0049] In the second embodiment, whether a PIN signal is indicated as a signal for self-diagnosis or is set to Hi by external noise is determined by using a plurality of PIN signals. Other parts can be made similar to those of the first embodiment, and descriptions of these other parts are omitted.

[0050] In the self-diagnosis mode, a signal indicating self-diagnosis, that is, a PIN signal is set to Hi in the control signal generating circuit 24 . In contrast, the PIN signal can be set to Hi by external noise. When the PIN signal is set to Hi, it is determined by using the clock signal CLK generated by the clock in the circuit 24 whether the PIN signal is a signal indicating self-diagnosis or is set to Hi by external noise.

[0051] First, when the PIN signal is set to Hi, a signal is output from the circuit 24, and the output potential of the STAT terminal is set to Hi in synchronization with the rising edge of the PIN signal. Specifically, an operation similar to that in...

no. 3 example

[0063] In the third embodiment, the acceleration sensor has two sensitivities for a single axis. Other parts can be made similar to those of the first embodiment, and descriptions of other parts will be omitted.

[0064] As shown in FIG. 6 , an integrated circuit (IC) package 30 (pressure sensor) includes a sensor element 10 , a C-V conversion circuit 21 , a switch circuit 22 , a signal processing circuit 23 and a control signal generation circuit 24 . The IC 30 further includes a power supply terminal 30a, a first output terminal 30b, a second output terminal 30c, a ground (GND) terminal 30d, a STAT terminal 30e and an input terminal 30f. These six terminals 30a-30f correspond to a lead frame 35 described below. The power supply terminal 30 a supplies the driving voltage VCC to the IC 30 . The first output terminal 30b outputs an output signal Go1. The second output terminal 30c outputs an output signal Go2. The GND terminal 30d is connected to the reference potential GND...

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Abstract

A capacitive sensor for detecting a physical quantity includes a movable electrode and a fixed electrode, and a controlling unit for applying a signal between the movable electrode and the fixed electrode. The controlling unit includes an input terminal, an output terminal, and a time measuring means for measuring a time period. The controlling unit measures the time period, for which a diagnosis instruction signal is input into the input terminal. The controlling unit performs the self-diagnosis, after the instruction signal continues for a predetermined time period.

Description

technical field [0001] The invention relates to a capacitive physical quantity sensor for detecting a physical quantity and a diagnostic method thereof. For example, the sensor can be used as an acceleration sensor in which the capacitance formed between the movable electrode and the fixed electrode changes when a physical quantity is applied. Background technique [0002] U.S. Patent No. 6,483,322 (corresponding to JP-A-2002-40047) discloses an acceleration sensor with a self-diagnostic function as a capacitive sensor for detecting physical quantities (dynamic quantities). When the sensor is in self-diagnostic mode, a voltage is applied between the movable and fixed electrodes in the sensor. Thereby, the movable electrode is forcibly moved and caused to oscillate. The sensor performs self-diagnosis regarding occurrence of an abnormality by detecting the output of an acceleration signal corresponding to the oscillation. [0003] Specifically, the sensor includes a control...

Claims

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Application Information

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IPC IPC(8): G01D18/00G01D5/24G01P15/125G01P21/00
CPCG01R27/2605G01D5/00G01P21/00G01P15/125G01D5/241G01D18/00G01D2218/10G01L1/14G01L25/00
Inventor 五藤敬介
Owner DENSO CORP
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