Data brokering system for integrated remote tool access, data collection, and control

a data brokering and data collection technology, applied in the field of emanufacturing systems and methods, can solve the problems of delay manufacturing, inconvenient maintenance of oem representatives on site, and inaccessibility of small ic manufacturing sites to oems for servi

Inactive Publication Date: 2003-11-06
ILS TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The data collected are usually proprietary and often sensitive.
Small IC manufacturing sites may not be readily accessible to the OEMs for service.
It is usually not economical to maintain an on-site OEM representati...

Method used

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  • Data brokering system for integrated remote tool access, data collection, and control
  • Data brokering system for integrated remote tool access, data collection, and control
  • Data brokering system for integrated remote tool access, data collection, and control

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Embodiment Construction

[0060] A preferred embodiment of the invention is discussed in detail below. While specific exemplary embodiments are discussed, it should be understood that this is done for illustration purposes only. A person skilled in the relevant art will recognize that other components and configurations can be used without parting from the spirit and scope of the invention.

[0061] Referring now to the drawings, FIG. 1 shows a diagnostic system for integrated remote tool access, data collection, and control according to the present invention. The system generally comprises one or more fabricators (FABs) 102a, 102b (collectively 102), each of which is coupled through a respective secure shared connection 104a, 104b, and the Internet 106 to one or more original equipment manufacturers (OEMs) 108a, 108b, 108c (collectively 108) of the tools. The secure shared connection 104 can be, for example, a virtual private network (VPN), or a Service Net connection that allows a single connection to access ...

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PUM

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Abstract

A data brokering system for semiconductor wafer data is presented that comprises: a FAB having at least one automated semiconductor wafer manufacturing tool; a plurality of OEMs, coupled to the FAB via a secure service net; means for providing data about a semiconductor wafer manufactured by the tool to one of the OEMs without revealing information about the tool; and means for collecting fees based on characteristics of the provided data.

Description

[0001] The present application claims the benefit of U.S. Provisional Patent Application No. 60 / 363,251, Confirmation No. 3918, filed Mar. 12, 2002 entitled "Diagnostic System and Method for Integrated Remote Tool Access, Data Collection, and Control," to Stuart Perry et al, the contents of which are incorporated herein by reference in their entirety.[0002] The present application is related to U.S. patent application filed Mar. 12, 2003, Attorney Docket number 40005-187899, entitled "Diagnostic System and Method for Integrated Remote Tool Access, Data Collection, and Control," of common assignee; and to U.S. patent application filed Mar. 12, 2003, Attorney Docket number 40005-187900, entitled "Data Sharing and Networking System for Integrated Remote Tool Access, Data Collection, and Control," of common assignee, both of which are incorporated by reference in their entirety.[0003] 1. Field of the Invention[0004] The present invention is related generally to e-Manufacturing systems a...

Claims

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Application Information

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IPC IPC(8): G05B19/418G05B23/02G06Q20/38H04L29/06H04L29/08H04M11/00
CPCG05B19/4183G05B2219/13G05B2219/31471G05B2219/31479G05B2219/32034H04L69/329G06F11/2294G06Q20/382H04L29/06H04L67/22H04L67/14G05B2219/32142G05B2223/06Y02P90/02H04L67/535G06Q50/00H04L9/40
Inventor PERRY, STUARTWUSSOW, WENDYBARBOZA, SUNIL
Owner ILS TECH INC
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